Determination of electron temperature in low-pressure plasmas by means of optical emission spectroscopy

JETP Letters ◽

10.1134/s0021364010050061 ◽

2010 ◽

Vol 91 (5) ◽

pp. 231-235 ◽

Author(s):

S. Mitic ◽

B. A. Klumov ◽

M. Y. Pustylnik ◽

G. E. Morfill

Keyword(s):

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

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Determination of the electron temperature and density in the negative glow of a nitrogen pulsed discharge using optical emission spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/43/1/015202 ◽

2009 ◽

Vol 43 (1) ◽

pp. 015202 ◽

Author(s):

L M Isola ◽

B J Gómez ◽

V Guerra

Keyword(s):

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Pulsed Discharge ◽

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Determination of electron temperature, atomic fluorine concentration, and gas temperature in inductively coupled fluorocarbon/rare gas plasmas using optical emission spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1454126 ◽

2002 ◽

Vol 20 (2) ◽

pp. 555-563 ◽

Author(s):

M. J. Schabel ◽

V. M. Donnelly ◽

A. Kornblit ◽

W. W. Tai

Keyword(s):

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Rare Gas ◽

Fluorine Concentration ◽

Gas Temperature ◽

Inductively Coupled ◽

Atomic Fluorine

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Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power

Journal of Applied Physics ◽

10.1063/1.3267292 ◽

2009 ◽

Vol 106 (11) ◽

pp. 113305 ◽

Author(s):

Véronique Massereau-Guilbaud ◽

Isabelle Géraud-Grenier ◽

André Plain

Keyword(s):

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission

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Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio method

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/43/40/403001 ◽

2010 ◽

Vol 43 (40) ◽

pp. 403001 ◽

Author(s):

Xi-Ming Zhu ◽

Yi-Kang Pu

Keyword(s):

Low Temperature ◽

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ratio Method ◽

Nitrogen Determination ◽

Low Temperature Plasmas

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Determination of the electron temperature profile above the evaporative source in an ion plating discharge by spatially resolved optical emission spectroscopy

Thin Solid Films ◽

10.1016/s0040-6090(03)00140-8 ◽

2003 ◽

Vol 434 (1-2) ◽

pp. 157-161 ◽

Author(s):

A.D. Wilson ◽

A. Davison ◽

A. Leyland ◽

A. Matthews ◽

K.S. Fancey

Keyword(s):

Electron Temperature ◽

Temperature Profile ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Plating ◽

Spatially Resolved

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Determination of electron temperature in ion plating discharges by optical emission spectroscopy

Vacuum ◽

10.1016/0042-207x(91)90010-g ◽

1991 ◽

Vol 42 (15) ◽

pp. 1013-1015 ◽

Author(s):

K.S. Fancey ◽

A. Matthews

Keyword(s):

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

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Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and a Collisional-Radiative Model

Plasma Science and Technology ◽

10.1088/1009-0630/13/3/02 ◽

2011 ◽

Vol 13 (3) ◽

pp. 267-278 ◽

Author(s):

Ximing Zhu ◽

Yikang Pu

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Energy Distributions ◽

Collisional Radiative Model ◽

Radiative Model

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Comparative determination of the electron temperature in Ar- and N2-plasmas with electrostatic probes, optical emission spectroscopy OES and energy dispersive mass spectrometry EDMS

The European Physical Journal Applied Physics ◽

10.1051/epjap:2001166 ◽

2001 ◽

Vol 15 (1) ◽

pp. 49-56 ◽

Author(s):

G. Crolly ◽

H. Oechsner

Keyword(s):

Mass Spectrometry ◽

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Dispersive ◽

Comparative Determination

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Animal and vegetable fats and oils. Determination of trace elements by inductively coupled plasma optical emission spectroscopy (ICP-OES)

10.3403/30303050u ◽

2016 ◽

Keyword(s):

Trace Elements ◽

Inductively Coupled Plasma ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Fats And Oils ◽

Icp Oes ◽

Inductively Coupled ◽

Plasma Optical Emission Spectroscopy

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Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy

2017 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2017.8496165 ◽

2017 ◽

Author(s):

Patrick Hermanns ◽

Bastian Hillebrand ◽

Marcel Fiebrandt ◽

Peter Awakowicz

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

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