Kinetics of the silicon dioxide growth process in afterglows of microwave‐induced plasmas
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1986 ◽
Vol 27
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pp. 219-237
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1999 ◽
Vol 347
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pp. 99-105
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1996 ◽
Vol 143
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pp. 1339-1347
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Vol 34
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pp. 118-127
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2000 ◽
Vol 99
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pp. 57-62
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