Secondary ion mass spectrometry study of the thermal stability of Cu/refractory metal/Si structures
2018 ◽
Vol 29
(12)
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pp. 2305-2316
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1986 ◽
Vol 13
(4)
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pp. 277-279
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1997 ◽
Vol 15
(6)
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pp. 3127-3133
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1984 ◽
Vol 80
(7)
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pp. 1903
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2016 ◽
Vol 321
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pp. 241-247
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1993 ◽
Vol 11
(5)
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pp. 2597-2602
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1994 ◽
Vol 210
(3)
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pp. 239-243
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