Secondary ion mass spectrometry study of the thermal stability of Cu/refractory metal/Si structures

1991 ◽  
Vol 69 (9) ◽  
pp. 6719-6721 ◽  
Author(s):  
L. C. Lane ◽  
T. C. Nason ◽  
G.‐R. Yang ◽  
T.‐M. Lu ◽  
H. Bakhru
1994 ◽  
Vol 210 (3) ◽  
pp. 239-243 ◽  
Author(s):  
H. Zou ◽  
G.M. Hood ◽  
J.A. Roy ◽  
R.J. Schultz ◽  
J.A. Jackman

1994 ◽  
Vol 76 (11) ◽  
pp. 7552-7558 ◽  
Author(s):  
F. Caccavale ◽  
P. Chakraborty ◽  
I. Mansour ◽  
G. Gianello ◽  
M. Mazzoleni ◽  
...  

2006 ◽  
Vol 600 (6) ◽  
pp. 1319-1325 ◽  
Author(s):  
A.J. Nelson ◽  
T.E. Felter ◽  
K.J. Wu ◽  
C. Evans ◽  
J.L. Ferreira ◽  
...  

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