Inclined slot-excited annular electron cyclotron resonance plasma source for hyperthermal neutral beam generation

2011 ◽  
Vol 82 (1) ◽  
pp. 013502 ◽  
Author(s):  
H.-J. You ◽  
D.-W. Kim ◽  
M. Koo ◽  
S.-O. Jang ◽  
Y.-H. Jung ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Neutral Beam ◽  
Electron Cyclotron Resonance Plasma ◽  
Beam Generation ◽  
Resonance Plasma

Electron cyclotron resonance plasma source for conductive film deposition

1994 ◽  
Vol 12 (4) ◽  
pp. 1281-1286 ◽  
Author(s):  
Toshiro Ono ◽  
Hiroshi Nishimura ◽  
Masaru Shimada ◽  
Seitaro Matsuo
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Film Deposition ◽  
Electron Cyclotron Resonance Plasma ◽  
Conductive Film ◽  
Resonance Plasma

Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

1993 ◽  
Vol 32 (Part 2, No. 6A) ◽  
pp. L802-L805 ◽  
Author(s):  
Akira Ishii ◽  
Yoshiyuki Sakaguchi ◽  
Shoichiro Minomo ◽  
Michio Taniguchi ◽  
Masato Sugiyo ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Carbon Film ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Electron Cyclotron Resonance Plasma ◽  
Diamond Like Carbon Film ◽  
Resonance Plasma
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