Origin of stress in radio frequency magnetron sputtered zinc oxide thin films
Keyword(s):
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2016 ◽
Vol 490
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pp. 16-20
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2013 ◽
Vol 13
(9)
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pp. 1954-1959
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2016 ◽
Vol 42
(15)
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pp. 17706-17710
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2020 ◽
Vol 6
(12)
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pp. 126447
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1998 ◽
Vol 37
(Part 2, No. 1A/B)
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pp. L50-L52
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