Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.03.087 ◽

2008 ◽

Vol 516 (7) ◽

pp. 1374-1376 ◽

Author(s):

G. Gonçalves ◽

P. Barquinha ◽

L. Raniero ◽

R. Martins ◽

E. Fortunato

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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Physical properties of indium zinc oxide and aluminium zinc oxide thin films deposited by radio-frequency magnetron sputtering

Materials Research Express ◽

10.1088/2053-1591/ab688d ◽

2020 ◽

Vol 6 (12) ◽

pp. 126447 ◽

Author(s):

Nicoleta Vasile ◽

Sorina Iftimie ◽

Tomy Acsente ◽

Claudiu Locovei ◽

Alina Irina Călugăr ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Physical Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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Optical properties of nano-structured zinc oxide thin films deposited by radio-frequency magnetron sputtering at different substrate temperatures

2012 IEEE Symposium on Humanities, Science and Engineering Research ◽

10.1109/shuser.2012.6268895 ◽

2012 ◽

Author(s):

I. Saurdi ◽

M. H. Mamat ◽

M. H. Abdullah ◽

A. Ishak ◽

M. Rusop

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Substrate Temperatures

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Structural, Electrical, and Optical Properties of Bismuth-doped Zinc-oxide Thin Films Grown by Radio-frequency Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.72.943 ◽

2018 ◽

Vol 72 (8) ◽

pp. 943-946

Author(s):

Johngeon Shin ◽

Shinho Cho

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Properties of Eu-doped zinc oxide thin films grown on glass substrates by radio-frequency magnetron sputtering

Current Applied Physics ◽

10.1016/j.cap.2013.08.007 ◽

2013 ◽

Vol 13 (9) ◽

pp. 1954-1959 ◽

Author(s):

Shinho Cho

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Glass Substrates

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Physical properties of gallium and aluminium co-doped zinc oxide thin films deposited at different radio frequency magnetron sputtering power

Ceramics International ◽

10.1016/j.ceramint.2016.08.091 ◽

2016 ◽

Vol 42 (15) ◽

pp. 17706-17710 ◽

Author(s):

E. Muchuweni ◽

T.S. Sathiaraj ◽

H. Nyakotyo

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Physical Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Power ◽

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Optical Recording in Ga and In-Doped Zinc Oxide Thin Films Grown by Radio-Frequency Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.l50 ◽

1998 ◽

Vol 37 (Part 2, No. 1A/B) ◽

pp. L50-L52 ◽

Author(s):

Tatsuhiko Matsushita ◽

Akio Suzuki ◽

Shogo Toda ◽

Takanori Aoki ◽

Masahiro Okuda

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Optical Recording ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Structural and electrical properties of fluorine-doped zinc tin oxide thin films prepared by radio-frequency magnetron sputtering

Current Applied Physics ◽

10.1016/j.cap.2014.03.020 ◽

2014 ◽

Vol 14 (6) ◽

pp. 850-855 ◽

Author(s):

R. Pandey ◽

S.H. Cho ◽

D.K. Hwang ◽

W.K. Choi

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Structural And Electrical Properties ◽

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Tungsten Doped Indium Oxide Thin Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering

Journal of Material Science and Technology ◽

10.1016/j.jmst.2013.10.023 ◽

2014 ◽

Vol 30 (7) ◽

pp. 644-648 ◽

Author(s):

Jiaojiao Pan ◽

Wenwen Wang ◽

Dongqi Wu ◽

Qiang Fu ◽

Ding Ma

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Characteristics of Indium Zinc Oxide Thin Films Deposited by Radio Frequency Reactive Magnetron Sputtering for Solar Cells Application

Solid State Phenomena - Advances in Nanomaterials and Processing ◽

10.4028/3-908451-31-0.999 ◽

2007 ◽

pp. 999-1002

Author(s):

Han Na Cho ◽

Jang Woo Lee ◽

Su Ryun Min ◽

Chee Won Chung

Keyword(s):

Solar Cells ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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Highly Transparent Conducting Indium Tin Oxide Thin Films Prepared by Radio Frequency Magnetron Sputtering and Thermal Annealing

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2019.16242 ◽

2019 ◽

Vol 19 (3) ◽

pp. 1455-1462 ◽

Author(s):

Bhaskar Parida ◽

Youngun Gil ◽

Hyunsoo Kim

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Thermal Annealing ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Transparent Conducting

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