Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering

2008 ◽  
Vol 516 (7) ◽  
pp. 1374-1376 ◽  
Author(s):  
G. Gonçalves ◽  
P. Barquinha ◽  
L. Raniero ◽  
R. Martins ◽  
E. Fortunato
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Indium Zinc Oxide

scholarly journals Physical properties of indium zinc oxide and aluminium zinc oxide thin films deposited by radio-frequency magnetron sputtering

2020 ◽  
Vol 6 (12) ◽  
pp. 126447 ◽  
Author(s):  
Nicoleta Vasile ◽  
Sorina Iftimie ◽  
Tomy Acsente ◽  
Claudiu Locovei ◽  
Alina Irina Călugăr ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Physical Properties ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Indium Zinc Oxide

Optical Recording in Ga and In-Doped Zinc Oxide Thin Films Grown by Radio-Frequency Magnetron Sputtering

1998 ◽  
Vol 37 (Part 2, No. 1A/B) ◽  
pp. L50-L52 ◽  
Author(s):  
Tatsuhiko Matsushita ◽  
Akio Suzuki ◽  
Shogo Toda ◽  
Takanori Aoki ◽  
Masahiro Okuda
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Optical Recording ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Oxide Thin Films
Sign in / Sign up

Export Citation Format

Share Document