Generation of high‐density O2 supermagnetron plasma over lower cathode by radio frequency power supply to upper cathode

1994 ◽  
Vol 75 (3) ◽  
pp. 1354-1360 ◽  
Author(s):  
Haruhisa Kinoshita
2019 ◽  
Author(s):  
Lin Huo ◽  
Xinyue Zhang ◽  
Simiao Fei ◽  
Hong Tian

2007 ◽  
Vol 82 (5-14) ◽  
pp. 912-919 ◽  
Author(s):  
E. Gaio ◽  
W. Kraus ◽  
C. Martens ◽  
R. Piovan ◽  
E. Speth ◽  
...  

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