Generation of high‐density O2 supermagnetron plasma over lower cathode by radio frequency power supply to upper cathode
Keyword(s):
Keyword(s):
1952 ◽
Vol 3
(4)
◽
pp. 124-126
◽
Keyword(s):
Keyword(s):
2007 ◽
Vol 82
(5-14)
◽
pp. 912-919
◽
Keyword(s):
2005 ◽
Vol 76
(6)
◽
pp. 063302
◽
Keyword(s):