Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking

1998 ◽  
Vol 83 (4) ◽  
pp. 1917-1923 ◽  
Author(s):  
N. Materer ◽  
Rory S. Goodman ◽  
Stephen R. Leone
Keyword(s):  
Radio Frequency ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Effectiveness of electron-cyclotron and transmission resonance heating in inductively coupled plasmas

2005 ◽  
Vol 12 (10) ◽  
pp. 104505 ◽  
Author(s):  
Oleg V. Polomarov ◽  
Constantine E. Theodosiou ◽  
Igor D. Kaganovich ◽  
Badri N. Ramamurthi ◽  
Demetre J. Economou
Keyword(s):  
Electron Cyclotron ◽  
Inductively Coupled Plasmas ◽  
Transmission Resonance ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Effects of radio-frequency bias on silicon oxide films deposited by dual electron cyclotron resonance-radio frequency hybrid plasma

2010 ◽  
Vol 59 (2) ◽  
pp. 1338
Author(s):  
Ke Bo ◽  
Wang Lei ◽  
Ni Tian-Ling ◽  
Ding Fang ◽  
Chen Mu-Di ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Cyclotron Resonance ◽  
Silicon Oxide ◽  
Electron Cyclotron Resonance ◽  
Oxide Films ◽  
Electron Cyclotron ◽  
Hybrid Plasma

Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias

2014 ◽  
Vol 23 (11) ◽  
pp. 115202 ◽  
Author(s):  
Fei Gao ◽  
Yu-Ru Zhang ◽  
Shu-Xia Zhao ◽  
Xue-Chun Li ◽  
You-Nian Wang
Keyword(s):  
Radio Frequency ◽  
Dynamic Behavior ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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