Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively coupled, high-density plasma reactor

1999 ◽  
Vol 85 (8) ◽  
pp. 3966-3975 ◽  
Author(s):  
Mark A. Sobolewski ◽  
James K. Olthoff ◽  
Yicheng Wang
Keyword(s):  
Radio Frequency ◽  
Plasma Reactor ◽  
High Density ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions ◽  
Density Plasma

scholarly journals Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

2012 ◽  
Vol 21 (6) ◽  
pp. 065009 ◽  
Author(s):  
Michael D Logue ◽  
Hyungjoo Shin ◽  
Weiye Zhu ◽  
Lin Xu ◽  
Vincent M Donnelly ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas
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