Ion energy distributions in radio frequency discharges sustained in gas mixtures obtained using a Monte Carlo-fluid hybrid model: endothermic processes and ion holes

1994 ◽  
Vol 3 (2) ◽  
pp. 190-205 ◽  
Author(s):  
H H Hwang ◽  
M J Kushner
Keyword(s):  
Monte Carlo ◽  
Radio Frequency ◽  
Hybrid Model ◽  
Gas Mixtures ◽  
Energy Distributions ◽  
Ion Energy ◽  
Radio Frequency Discharges ◽  
Ion Energy Distributions

Ion energy distributions in radio‐frequency discharges

1991 ◽  
Vol 70 (1) ◽  
pp. 82-92 ◽  
Author(s):  
D. Field ◽  
D. F. Klemperer ◽  
P. W. May ◽  
Y. P. Song
Keyword(s):  
Radio Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Radio Frequency Discharges ◽  
Ion Energy Distributions

Ion energy distributions in dual‐ and single‐mode microwave/radio‐frequency plasma

1995 ◽  
Vol 78 (8) ◽  
pp. 4855-4858 ◽  
Author(s):  
P. Reinke ◽  
S. Bureau ◽  
J. E. Klemberg‐Sapieha ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Single Mode ◽  
Radio Frequency Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Frequency Plasma ◽  
Microwave Radio ◽  
Ion Energy Distributions

Monte Carlo‐fluid hybrid model of the accumulation of dust particles at sheath edges in radio‐frequency discharges

1991 ◽  
Vol 59 (6) ◽  
pp. 638-640 ◽  
Author(s):  
Timothy J. Sommerer ◽  
Michael S. Barnes ◽  
John H. Keller ◽  
Michael J. McCaughey ◽  
Mark J. Kushner
Keyword(s):  
Monte Carlo ◽  
Radio Frequency ◽  
Hybrid Model ◽  
Dust Particles ◽  
Radio Frequency Discharges
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