Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

2000 ◽  
Vol 87 (5) ◽  
pp. 2114-2121 ◽  
Author(s):  
Yicheng Wang ◽  
Eric C. Benck ◽  
Martin Misakian ◽  
Manabu Edamura ◽  
James K. Olthoff
Keyword(s):  
Radio Frequency ◽  
Energy Distributions ◽  
Time Resolved ◽  
Ion Energy ◽  
Optical Emissions ◽  
Radio Frequency Discharges ◽  
Ion Energy Distributions ◽  
Time Resolved Measurements

scholarly journals Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma

2017 ◽  
Vol 24 (11) ◽  
pp. 113501 ◽  
Author(s):  
A. Megía-Macías ◽  
O. D. Cortázar ◽  
O. Tarvainen ◽  
H. Koivisto
Keyword(s):  
Microwave Plasma ◽  
Hydrogen Ion ◽  
Energy Distributions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distributions ◽  
Time Resolved Measurements

Ion energy distributions in radio‐frequency discharges

1991 ◽  
Vol 70 (1) ◽  
pp. 82-92 ◽  
Author(s):  
D. Field ◽  
D. F. Klemperer ◽  
P. W. May ◽  
Y. P. Song
Keyword(s):  
Radio Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Radio Frequency Discharges ◽  
Ion Energy Distributions
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