Amorphous and microcrystalline silicon films grown at low temperatures by radio-frequency and hot-wire chemical vapor deposition
Keyword(s):
Hot Wire
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2001 ◽
Vol 19
(5)
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pp. 2328-2334
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2000 ◽
Vol 266-269
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pp. 385-390
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2008 ◽
Vol 51
(4)
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pp. 371-377
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2010 ◽
Vol 49
(8)
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pp. 081402
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2000 ◽
Vol 266-269
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pp. 110-114
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2016 ◽
Vol 55
(8)
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pp. 089203
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