Non-equilibrium processes in low temperature silicon epitaxy
2007 ◽
Vol 86
◽
pp. 011001
◽
2006 ◽
Vol 39
(8)
◽
pp. 1606-1618
◽
2000 ◽
Vol 33
(21)
◽
pp. L125-L128
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1988 ◽
1985 ◽
Vol 127
(1-2)
◽
pp. 159-166
◽
2015 ◽
Vol 220-221
◽
pp. 917-921
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2017 ◽
Vol 19
(30)
◽
pp. 19590-19600
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