Thermal diffusivity measurement of polymeric thin films using the photothermal displacement technique. II. On-wafer measurement

Journal of Applied Physics ◽

10.1063/1.371650 ◽

1999 ◽

Vol 86 (11) ◽

pp. 6028-6038 ◽

Author(s):

Chuan Hu ◽

Ennis T. Ogawa ◽

Paul S. Ho

Keyword(s):

Thermal Diffusivity ◽

Thermal Diffusivity Measurement ◽

Polymeric Thin Films ◽

Diffusivity Measurement

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Thermal diffusivity measurement of polymeric thin films using the photothermal displacement technique. I. Free-standing film case

Journal of Applied Physics ◽

10.1063/1.371649 ◽

1999 ◽

Vol 86 (11) ◽

pp. 6018-6027 ◽

Author(s):

Ennis T. Ogawa ◽

Chuan Hu ◽

Paul S. Ho

Keyword(s):

Thermal Diffusivity ◽

Free Standing ◽

Thermal Diffusivity Measurement ◽

Polymeric Thin Films ◽

Diffusivity Measurement

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In-plane thermal diffusivity measurement of highly thermal conductive thin films by the flash method

2018 34th Thermal Measurement, Modeling & Management Symposium (SEMI-THERM) ◽

10.1109/semi-therm.2018.8357374 ◽

2018 ◽

Author(s):

Jozef Gembarovic ◽

Heng Wang ◽

Silviu Apostolescu ◽

Daniele Paganelli ◽

Piero Scotto

Keyword(s):

Thermal Diffusivity ◽

Flash Method ◽

Thermal Diffusivity Measurement ◽

Diffusivity Measurement ◽

Conductive Thin Films

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Effects of finite absorption depth and infrared detector nonlinearity on thermal diffusivity measurement of thin films using the flash method

Review of Scientific Instruments ◽

10.1063/1.1145377 ◽

1995 ◽

Vol 66 (8) ◽

pp. 4249-4253 ◽

Author(s):

D. W. Tang ◽

G. H. He ◽

B. L. Zhou ◽

H. Zhang

Keyword(s):

Thermal Diffusivity ◽

Infrared Detector ◽

Flash Method ◽

Thermal Diffusivity Measurement ◽

Diffusivity Measurement

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A NEW FIN MODEL ON IN-PLANE THERMAL DIFFUSIVITY MEASUREMENT OF THIN FILMS BY THE FLASH METHOD

10.1615/ihtc16.tpm.023763 ◽

2018 ◽

Author(s):

Jozef Gembarovic ◽

Heng Wang ◽

Daniele Paganelli

Keyword(s):

Thermal Diffusivity ◽

Flash Method ◽

Thermal Diffusivity Measurement ◽

Diffusivity Measurement

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Development of ac Calorimetric Method for Thermal Diffusivity Measurement IV: Films with Low Thermal Diffusivity and Very Thin Films

Japanese Journal of Applied Physics ◽

10.1143/jjap.30.1295 ◽

1991 ◽

Vol 30 (Part 1, No. 6) ◽

pp. 1295-1298 ◽

Author(s):

Yuqin Gu ◽

Ichiro Hatta

Keyword(s):

Thermal Diffusivity ◽

Calorimetric Method ◽

Thermal Diffusivity Measurement ◽

Diffusivity Measurement ◽

Ac Calorimetric Method

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Development of a thermal diffusivity measurement system for metal thin films using a picosecond thermoreflectance technique

Measurement Science and Technology ◽

10.1088/0957-0233/12/12/306 ◽

2001 ◽

Vol 12 (12) ◽

pp. 2064-2073 ◽

Author(s):

Naoyuki Taketoshi ◽

Tetsuya Baba ◽

Akira Ono

Keyword(s):

Thermal Diffusivity ◽

Measurement System ◽

Thermal Diffusivity Measurement ◽

Metal Thin Films ◽

Diffusivity Measurement

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Modelling of thermal diffusivity measurement of diamond thin films using a pulsed laser technique

Surface and Coatings Technology ◽

10.1016/0257-8972(93)90268-s ◽

1993 ◽

Vol 62 (1-3) ◽

pp. 361-366 ◽

Author(s):

P. Hui ◽

H.S. Tan

Keyword(s):

Thermal Diffusivity ◽

Pulsed Laser ◽

Laser Technique ◽

Thermal Diffusivity Measurement ◽

Diffusivity Measurement ◽

Diamond Thin Films

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Theory for In-Situ Thermal Diffusivity Measurement of Thin Films by a Radial Heat Flow Method

Thermal Conductivity 14 ◽

10.1007/978-1-4899-3751-3_73 ◽

1976 ◽

pp. 545-546 ◽

Author(s):

A. B. Donaldson ◽

W. P. Schimmel

Keyword(s):

Thermal Diffusivity ◽

Heat Flow ◽

Thermal Diffusivity Measurement ◽

Flow Method ◽

Diffusivity Measurement ◽

Radial Heat Flow ◽

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Cross-plane thermal conductivity and thermal diffusivity measurement in thin-films by one-dimensional thermal wave method

2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2011.6017544 ◽

2011 ◽

Author(s):

Zhigang Zeng ◽

Chao Shen ◽

Binjie Shen ◽

Zhiyu Hu

Keyword(s):

Thermal Conductivity ◽

Thermal Diffusivity ◽

Thermal Wave ◽

Wave Method ◽

Thermal Diffusivity Measurement ◽

One Dimensional ◽

Diffusivity Measurement ◽

Thermal Wave Method

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In-Plane Thermal Diffusivity Measurement of Thin Films Based on the Alternating-Current Calorimetric Method Using an Optical Reflectivity Technique

Chinese Physics Letters ◽

10.1088/0256-307x/21/4/035 ◽

2004 ◽

Vol 21 (4) ◽

pp. 713-715 ◽

Author(s):

Huang Zheng-Xing ◽

Tang Zhen-An ◽

Xu Zi-Qiang ◽

Ding Hai-Tao ◽

Gu Yu-Qin

Keyword(s):

Thermal Diffusivity ◽

Alternating Current ◽

Calorimetric Method ◽

Thermal Diffusivity Measurement ◽

Optical Reflectivity ◽

Diffusivity Measurement

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