scholarly journals Electron properties and air mixing in radio frequency driven argon plasma jets at atmospheric pressure

2013 ◽  
Vol 103 (6) ◽  
pp. 064103 ◽  
Author(s):  
Bram van Gessel ◽  
Ronny Brandenburg ◽  
Peter Bruggeman
2014 ◽  
Vol 42 (4) ◽  
pp. 911-916 ◽  
Author(s):  
Zhen Zheng ◽  
Zhaoquan Chen ◽  
Pei Liu ◽  
Ming Chen ◽  
Guodong Wang ◽  
...  

2020 ◽  
Vol 117 (13) ◽  
pp. 134102
Author(s):  
Xuechen Li ◽  
Jiacun Wu ◽  
Boyu Jia ◽  
Kaiyue Wu ◽  
Pengcheng Kang ◽  
...  

2008 ◽  
Vol 80 (9) ◽  
pp. 1919-1930 ◽  
Author(s):  
Gheorghe Dinescu ◽  
Eusebiu R. Ionita

We report on the operation and characteristics of radio frequency (RF) plasma beam sources based on the expansion of the discharge outside of limited spaces with small interelectrode gaps. The appropriate electrode configuration, combined with high mass flow values and appropriate power levels, leads to small- or large-size plasma jets, working stably at low, intermediate, and atmospheric pressures. The sources are promising tools for a wide range of applications in thin film deposition, surface modification, and cleaning, including the case of temperature-sensitive substrates.


2020 ◽  
Vol 48 (4) ◽  
pp. 991-1000 ◽  
Author(s):  
Wei Lin ◽  
Zhenyu Tan ◽  
Xinxian Chen ◽  
Yadi Liu ◽  
Xiaolong Wang ◽  
...  

2009 ◽  
Vol 162 ◽  
pp. 012013 ◽  
Author(s):  
L Schaper ◽  
S Reuter ◽  
J Waskoenig ◽  
K Niemi ◽  
V Schulz-von der Gathen ◽  
...  

2017 ◽  
Vol 24 (8) ◽  
pp. 083509 ◽  
Author(s):  
Xinxian Chen ◽  
Zhenyu Tan ◽  
Yadi Liu ◽  
Xiaotong Li ◽  
Jie Pan ◽  
...  

2011 ◽  
Vol 18 (10) ◽  
pp. 103502 ◽  
Author(s):  
Shou-Zhe Li ◽  
Qi Wu ◽  
Wen Yan ◽  
Dezhen Wang ◽  
Han S. Uhm

2015 ◽  
Vol 118 (2) ◽  
pp. 023307 ◽  
Author(s):  
Zhaoquan Chen ◽  
Guangqing Xia ◽  
Changlin Zou ◽  
Ping Li ◽  
Yelin Hu ◽  
...  

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