scholarly journals Development of array-type atmospheric-pressure RF plasma generator with electric on–off control for high-throughput numerically controlled processes

2016 ◽  
Vol 87 (10) ◽  
pp. 105121
Author(s):  
H. Takei ◽  
S. Kurio ◽  
S. Matsuyama ◽  
K. Yamauchi ◽  
Y. Sano
Keyword(s):  
High Throughput ◽  
Atmospheric Pressure ◽  
Plasma Generator ◽  
Rf Plasma ◽  
Array Type ◽  
Controlled Processes

High-throughput deterministic plasma etching using array-type plasma generator system

2021 ◽  
Vol 92 (12) ◽  
pp. 125107
Author(s):  
Yasuhisa Sano ◽  
Ken Nishida ◽  
Ryohei Asada ◽  
Shinya Okayama ◽  
Daisetsu Toh ◽  
...  
Keyword(s):  
High Throughput ◽  
Plasma Etching ◽  
Plasma Generator ◽  
Generator System ◽  
Array Type

Numerically controlled sacrificial plasma oxidation using array-type electrode toward high-throughput deterministic machining

2011 ◽  
Vol 7 (3/4) ◽  
pp. 289
Author(s):  
Yasuhisa Sano ◽  
Keinosuke Yoshinaga ◽  
Shohei Kamisaka ◽  
Hidekazu Mimura ◽  
Satoshi Matsuyama ◽  
...  
Keyword(s):  
High Throughput ◽  
Plasma Oxidation ◽  
Array Type

Application of cold atmospheric pressure plasmas for high-throughput production of safe-to-consume beetroot juice with improved nutritional quality

2021 ◽  
Vol 336 ◽  
pp. 127635 ◽  
Author(s):  
Anna Dzimitrowicz ◽  
Piotr Jamroz ◽  
Piotr Cyganowski ◽  
Aleksandra Bielawska-Pohl ◽  
Aleksandra Klimczak ◽  
...  
Keyword(s):  
High Throughput ◽  
Atmospheric Pressure ◽  
Nutritional Quality ◽  
Beetroot Juice ◽  
Atmospheric Pressure Plasmas

Radio frequency expanding plasmas at low, intermediate, and atmospheric pressure and their applications

2008 ◽  
Vol 80 (9) ◽  
pp. 1919-1930 ◽  
Author(s):  
Gheorghe Dinescu ◽  
Eusebiu R. Ionita
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Plasma Jets ◽  
Film Deposition ◽  
High Mass ◽  
Rf Plasma ◽  
Temperature Sensitive ◽  
Large Size ◽  
Wide Range

We report on the operation and characteristics of radio frequency (RF) plasma beam sources based on the expansion of the discharge outside of limited spaces with small interelectrode gaps. The appropriate electrode configuration, combined with high mass flow values and appropriate power levels, leads to small- or large-size plasma jets, working stably at low, intermediate, and atmospheric pressures. The sources are promising tools for a wide range of applications in thin film deposition, surface modification, and cleaning, including the case of temperature-sensitive substrates.

scholarly journals Transfer of POCl3 diffusion processes from atmospheric pressure to high throughput low pressure

2018 ◽  
Author(s):  
Sabrina Lohmüller (née Werner) ◽  
Stefan Schmidt ◽  
Elmar Lohmüller ◽  
Alexander Piechulla ◽  
Udo Belledin ◽  
...  
Keyword(s):  
High Throughput ◽  
Atmospheric Pressure ◽  
Diffusion Processes ◽  
Low Pressure

scholarly journals Enhancing charging and capture efficiency of aerosol nanoparticles using an atmospheric-pressure, flow-through RF plasma with a downstream DC bias

2020 ◽  
Vol 54 (11) ◽  
pp. 1249-1254
Author(s):  
Sukrant Dhawan ◽  
Abhay Vidwans ◽  
Girish Sharma ◽  
Nabiel Hilmy Abuyazid ◽  
R Mohan Sankaran ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Capture Efficiency ◽  
Rf Plasma ◽  
Pressure Flow ◽  
Aerosol Nanoparticles ◽  
Flow Through ◽  
Dc Bias
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