Fabrication of thermal-resistant gratings for high-temperature measurements using geometric phase analysis

2016 ◽  
Vol 87 (12) ◽  
pp. 123104 ◽  
Author(s):  
Q. Zhang ◽  
Z. Liu ◽  
H. Xie ◽  
K. Ma ◽  
L. Wu
Keyword(s):  
High Temperature ◽  
Phase Analysis ◽  
Geometric Phase ◽  
Temperature Measurements ◽  
Geometric Phase Analysis ◽  
High Temperature Measurements

Passive Auto-Focus Algorithm for Correcting Image Distortions Caused by Gas Flow in High-Temperature Measurements of Surface Phenomena

2012 ◽  
Vol 17 (4) ◽  
pp. 379-384 ◽  
Author(s):  
Krzysztof Strzecha ◽  
Tomasz Koszmider ◽  
Damian Zarębski ◽  
Wojciech Łobodziński
Keyword(s):  
High Temperature ◽  
Gas Flow ◽  
Temperature Measurements ◽  
Surface Phenomena ◽  
Auto Focus ◽  
High Temperature Measurements

Abstract In this paper, a case-study of the auto-focus algorithm for correcting image distortions caused by gas flow in high-temperature measurements of surface phenomena is presented. This article shows results of proposed algorithm and methods for increasing its accuracy.

Local Lattice Strain Measurement Using Geometric Phase Analysis of Dark Field Images from Scanning Transmission Electron Microscopy

2011 ◽  
Author(s):  
Jayhoon Chung ◽  
Guoda Lian ◽  
Lew Rabenberg
Keyword(s):  
Phase Analysis ◽  
Geometric Phase ◽  
Process Development ◽  
Local Strain ◽  
Strain Engineering ◽  
Dark Field ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Geometric Phase Analysis ◽  
Scanning Transmission

Abstract Since strain engineering plays a key role in semiconductor technology development, a reliable and reproducible technique to measure local strain in devices is necessary for process development and failure analysis. In this paper, geometric phase analysis of high angle annular dark field - scanning transmission electron microscope images is presented as an effective technique to measure local strains in the current node of Si based transistors.

Dislocation core investigation by geometric phase analysis and the dislocation density tensor

2008 ◽  
Vol 41 (3) ◽  
pp. 035408 ◽  
Author(s):  
J Kioseoglou ◽  
G P Dimitrakopulos ◽  
Ph Komninou ◽  
Th Karakostas ◽  
E C Aifantis
Keyword(s):  
Dislocation Density ◽  
Phase Analysis ◽  
Geometric Phase ◽  
Dislocation Core ◽  
Density Tensor ◽  
Geometric Phase Analysis ◽  
Dislocation Density Tensor

High-temperature measurements of surface tension of metals in vacuum

2007 ◽  
Vol 71 (5) ◽  
pp. 608-610 ◽  
Author(s):  
M. V. Gedgagova ◽  
Kh. M. Guketlov ◽  
V. K. Kumykov ◽  
A. R. Manukyants ◽  
I. N. Sergeev ◽  
...  
Keyword(s):  
Surface Tension ◽  
High Temperature ◽  
Temperature Measurements ◽  
High Temperature Measurements
Sign in / Sign up

Export Citation Format

Share Document