Local Lattice Strain Measurement Using Geometric Phase Analysis of Dark Field Images from Scanning Transmission Electron Microscopy

2011 ◽  
Author(s):  
Jayhoon Chung ◽  
Guoda Lian ◽  
Lew Rabenberg
Keyword(s):  
Phase Analysis ◽  
Geometric Phase ◽  
Process Development ◽  
Local Strain ◽  
Strain Engineering ◽  
Dark Field ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Geometric Phase Analysis ◽  
Scanning Transmission

Abstract Since strain engineering plays a key role in semiconductor technology development, a reliable and reproducible technique to measure local strain in devices is necessary for process development and failure analysis. In this paper, geometric phase analysis of high angle annular dark field - scanning transmission electron microscope images is presented as an effective technique to measure local strains in the current node of Si based transistors.

scholarly journals Local Lattice Strain Measurement using Geometric Phase Analysis of Annular Dark Field Images from Scanning Transmission Electron Microscopy

2010 ◽  
Vol 16 (S2) ◽  
pp. 1476-1477 ◽  
Author(s):  
J Chung ◽  
G Lian ◽  
L Rabenberg
Keyword(s):  
Geometric Phase ◽  
Strain Measurement ◽  
Scanning Transmission Electron Microscopy ◽  
Lattice Strain ◽  
Dark Field ◽  
Transmission Electron ◽  
Geometric Phase Analysis ◽  
Scanning Transmission ◽  
Annular Dark Field ◽  
Local Lattice

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Enhancement of Contrast in the CEM and STEM Using Bumpy Specimens and Employing the “Dappled Field” Mode of Operation

1974 ◽  
Vol 32 ◽  
pp. 552-553 ◽  
Author(s):  
L. Gandolfi ◽  
J. Reiffel
Keyword(s):  
Operating Mode ◽  
Scanning Transmission Electron Microscope ◽  
Dark Field ◽  
Specimen Preparation ◽  
Field Mode ◽  
Preparation Methods ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Mode Of Operation ◽  
Scanning Transmission

Calculations have been performed on the contrast obtainable, using the Scanning Transmission Electron Microscope, in the observation of thick specimens. Recent research indicates a revival of an earlier interest in the observation of thin specimens with the view of comparing the attainable contrast using both types of specimens.Potential for biological applications of scanning transmission electron microscopy has led to a proliferation of the literature concerning specimen preparation methods and the controversy over “to stain or not to stain” in combination with the use of the dark field operating mode and the same choice of technique using bright field mode of operation has not yet been resolved.

Resolution in the Scanning Transmission Electron Microscope

1972 ◽  
Vol 30 ◽  
pp. 454-455
Author(s):  
M. G. R. Thomson
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Spherical Aberration ◽  
Signal To Noise Ratio ◽  
Scanning Transmission Electron Microscope ◽  
Dark Field ◽  
Objective Lens ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

The variation of contrast and signal to noise ratio with change in detector solid angle in the high resolution scanning transmission electron microscope was discussed in an earlier paper. In that paper the conclusions were that the most favourable conditions for the imaging of isolated single heavy atoms were, using the notation in figure 1, either bright field phase contrast with β0⋍0.5 α0, or dark field with an annular detector subtending an angle between ao and effectively π/2.The microscope is represented simply by the model illustrated in figure 1, and the objective lens is characterised by its coefficient of spherical aberration Cs. All the results for the Scanning Transmission Electron Microscope (STEM) may with care be applied to the Conventional Electron Microscope (CEM). The object atom is represented as detailed in reference 2, except that ϕ(θ) is taken to be the constant ϕ(0) to simplify the integration. This is reasonable for θ ≤ 0.1 θ0, where 60 is the screening angle.

Determination of Nanocluster Sizes from Dark-Field Scanning Transmission Electron Microscopy Images

2008 ◽  
Vol 112 (6) ◽  
pp. 1759-1763 ◽  
Author(s):  
Norihiko L. Okamoto ◽  
Bryan W. Reed ◽  
Shareghe Mehraeen ◽  
Apoorva Kulkarni ◽  
David Gene Morgan ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Dark Field ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Microscopy Images

scholarly journals Identification of interstratified mica and pyrophyllite monolayers within chlorite using advanced scanning/transmission electron microscopy

2019 ◽  
Vol 104 (10) ◽  
pp. 1436-1443
Author(s):  
Guanyu Wang ◽  
Hejing Wang ◽  
Jianguo Wen
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Beam ◽  
Clay Minerals ◽  
Scanning Transmission Electron Microscopy ◽  
Dark Field ◽  
Chemical Compositions ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

Abstract Interstratified clay minerals reflect the weathering degree and record climatic conditions and the pedogenic processes in the soil. It is hard to distinguish a few layers of interstratified clay minerals from the chlorite matrix, due to their similar two-dimensional tetrahedral-octahedral-tetrahedral (TOT) structure and electron-beam sensitive nature during transmission electron microscopy (TEM) imaging. Here, we used multiple advanced TEM techniques including low-dose high-resolution TEM (HRTEM), high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) imaging combined with energy-dispersive spectroscopic (EDS) mapping to study interstratified layers in a chlo-rite sample from Changping, Beijing, China. We demonstrated an interstratified mica or pyrophyllite monolayer could be well distinguished from the chlorite matrix by projected atomic structures, lattice spacings, and chemical compositions with advanced TEM techniques. Further investigation showed two different transformation mechanisms from mica or pyrophyllite to chlorite: either a 4 Å increase or decrease in the lattice spacing. This characterization approach can be extended to the studies of other electron-beam sensitive minerals.

A further investigation of the complex M3 murataite structure using Hf substitution and STEM-EELS techniques

2019 ◽  
Vol 75 (3) ◽  
pp. 442-448
Author(s):  
Ryosuke S. S. Maki ◽  
Peter E. D. Morgan
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Radioactive Waste ◽  
Scanning Transmission Electron Microscopy ◽  
Dark Field ◽  
Site Preference ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Annular Dark Field

Many members of the complex crystalline fluorite supercell structures (e.g. zirconolite, pyrochlore and murataite polytypes) have been considered/studied for possible long-term radioactive-waste immobilization. The eight-coordinated sites in these crystals are of particular importance because they are preferred for the accommodation of trivalent rare earths and actinides present in radioactive waste from fuel element processing. The fluorite-type supercell structures include the murataites, M3, M5, M7, M8, having those numbers of repeating fluorite sub-cell units. One simple technique, as shown here, namely the substitution of Hf into the Zr site, is very helpful for structural analysis in these very complex cases in order to further illuminate the site preference of the Zr ion. Three M3 murataite samples, Ca-Mn-Ti-Zr-Al-Fe-O (regular M3), Ca-Ti-Zr-Al-Fe-O (Mn-free M3) and Ca-Mn-Ti-Hf-Al-Fe-O (Hf-substituted M3) are investigated and, through techniques described for larger cells, show that the Zr is very likely not to be hosted in the [6] Ti site in the M3 murataite structure, as suggested by Pakhomova et al. [(2013), Z. Kristallogr. Cryst. Mater. 228, 151–156], but more likely replaces the [8] Ca1 site and less likely the [8] Ca2 site. This adjusted site preference for each cation from the powder X-ray diffraction (PXRD) and scanning transmission electron microscopy electron energy-loss spectroscopy (STEM-EELS) methods, agrees well with the high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) image.

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