Size-dependent piezoelectricity of molybdenum disulfide (MoS2) films obtained by atomic layer deposition (ALD)

2017 ◽  
Vol 111 (6) ◽  
pp. 063902 ◽  
Author(s):  
Yazhou Huang ◽  
Lei Liu ◽  
Jingjie Sha ◽  
Yunfei Chen
Keyword(s):  
Atomic Layer Deposition ◽  
Molybdenum Disulfide ◽  
Atomic Layer ◽  
Size Dependent ◽  
Layer Deposition

Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub‐50 nm Nanopatterns by Diffusion and Size‐Dependent Reactivity

2021 ◽  
Vol 8 (20) ◽  
pp. 2100846
Author(s):  
Jan‐Willem J. Clerix ◽  
Esteban A. Marques ◽  
Job Soethoudt ◽  
Fabio Grillo ◽  
Geoffrey Pourtois ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Size Dependent ◽  
Layer Deposition

scholarly journals Diffusion-Mediated Growth and Size-Dependent Nanoparticle Reactivity during Ruthenium Atomic Layer Deposition on Dielectric Substrates

2018 ◽  
Vol 5 (24) ◽  
pp. 1800870 ◽  
Author(s):  
Job Soethoudt ◽  
Fabio Grillo ◽  
Esteban A. Marques ◽  
J. Ruud van Ommen ◽  
Yoann Tomczak ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Substrates ◽  
Size Dependent ◽  
Layer Deposition

Atomic layer deposited molybdenum disulfide on Si photocathodes for highly efficient photoelectrochemical water reduction reaction

2017 ◽  
Vol 5 (7) ◽  
pp. 3304-3310 ◽  
Author(s):  
Seungtaeg Oh ◽  
Jun Beom Kim ◽  
Jun Tae Song ◽  
Jihun Oh ◽  
Soo-Hyun Kim
Keyword(s):  
Atomic Layer Deposition ◽  
Molybdenum Disulfide ◽  
Low Cost ◽  
Atomic Layer ◽  
Reduction Reaction ◽  
Water Reduction ◽  
Noble Metal Catalysts ◽  
Highly Efficient ◽  
Layer Deposition ◽  
Earth Abundant

MoS2 is an earth-abundant and low-cost HER electrocatalyst that can substitute noble metal catalysts. Here, we develop the atomic layer deposition (ALD) of MoS2 nanomaterials on p-Si photocathodes for highly efficient and stable PEC water reduction reactions.

scholarly journals Atomic layer deposition of molybdenum disulfide films using MoF6 and H2S

2018 ◽  
Vol 36 (1) ◽  
pp. 01A125 ◽  
Author(s):  
Anil U. Mane ◽  
Steven Letourneau ◽  
David J. Mandia ◽  
Jian Liu ◽  
Joseph A. Libera ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Molybdenum Disulfide ◽  
Atomic Layer ◽  
Layer Deposition
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