Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma

2000 ◽  
Vol 88 (2) ◽  
pp. 635-642 ◽  
Author(s):  
O. Zabeida ◽  
A. Hallil ◽  
M. R. Wertheimer ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Plasma ◽  
Dual Mode ◽  
Energy Distributions ◽  
Time Resolved ◽  
Ion Energy ◽  
Frequency Plasma ◽  
Microwave Radio ◽  
Ion Energy Distributions ◽  
Time Resolved Measurements

Ion energy distributions in dual‐ and single‐mode microwave/radio‐frequency plasma

1995 ◽  
Vol 78 (8) ◽  
pp. 4855-4858 ◽  
Author(s):  
P. Reinke ◽  
S. Bureau ◽  
J. E. Klemberg‐Sapieha ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Single Mode ◽  
Radio Frequency Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Frequency Plasma ◽  
Microwave Radio ◽  
Ion Energy Distributions

scholarly journals Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma

2017 ◽  
Vol 24 (11) ◽  
pp. 113501 ◽  
Author(s):  
A. Megía-Macías ◽  
O. D. Cortázar ◽  
O. Tarvainen ◽  
H. Koivisto
Keyword(s):  
Microwave Plasma ◽  
Hydrogen Ion ◽  
Energy Distributions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distributions ◽  
Time Resolved Measurements

Dual‐mode microwave/radio frequency plasma deposition of dielectric thin films

1989 ◽  
Vol 54 (26) ◽  
pp. 2645-2647 ◽  
Author(s):  
L. Martinu ◽  
J. E. Klemberg‐Sapieha ◽  
M. R. Wertheimer
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Plasma Deposition ◽  
Radio Frequency Plasma ◽  
Dual Mode ◽  
Dielectric Thin Films ◽  
Frequency Plasma ◽  
Microwave Radio
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