Electron density measurement using a partially covered hairpin resonator in an inductively coupled plasma

2020 ◽  
Vol 91 (11) ◽  
pp. 113502
Author(s):  
Xingchen Fan ◽  
Yhoshua Wug ◽  
Jia Han ◽  
Patrick Pribyl ◽  
Troy Carter
Keyword(s):  
Electron Density ◽  
Inductively Coupled Plasma ◽  
Density Measurement ◽  
Inductively Coupled ◽  
Hairpin Resonator

scholarly journals Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

2011 ◽  
Vol 110 (7) ◽  
pp. 073303 ◽  
Author(s):  
Ayumi Ando ◽  
Tomoko Kurose ◽  
Vivien Reymond ◽  
Katsuhisa Kitano ◽  
Hideaki Kitahara ◽  
...  
Keyword(s):  
Electron Density ◽  
Time Domain ◽  
Density Measurement ◽  
Inductively Coupled Plasmas ◽  
Terahertz Time Domain Spectroscopy ◽  
Time Domain Spectroscopy ◽  
Inductively Coupled ◽  
Coupled Plasmas
Sign in / Sign up

Export Citation Format

Share Document