Spatial profiles of electron density in the inductively coupled plasma
1985 ◽
Vol 40
(7)
◽
pp. 987-993
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2019 ◽
Vol 47
(5)
◽
pp. 2102-2109
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1982 ◽
Vol 37
(10)
◽
pp. 869-879
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Keyword(s):
1985 ◽
Vol 40
(4)
◽
pp. 579-591
◽
2012 ◽
Vol 21
(5)
◽
pp. 055032
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Keyword(s):
1994 ◽
Vol 49
(5)
◽
pp. 495-526
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1991 ◽
Vol 46
(6-7)
◽
pp. 805-817
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