Time-Resolved Electron Density Measurement Characterization of E-H Modes for Inductively Coupled Plasma Instabilities

2018 ◽  
Author(s):  
David J. Coumou ◽  
Shaun Smith ◽  
Aung Toe ◽  
Scott White ◽  
Steven C. Shannon ◽  
...  
Keyword(s):  
Electron Density ◽  
Inductively Coupled Plasma ◽  
Density Measurement ◽  
Plasma Instabilities ◽  
Time Resolved ◽  
Inductively Coupled

Characterization of inductively coupled plasma time-of-flight mass spectrometry in combination with collision/reaction cell technology – insights from highly time-resolved measurements

2019 ◽  
Vol 34 (1) ◽  
pp. 135-146 ◽  
Author(s):  
Marcel Burger ◽  
Lyndsey Hendriks ◽  
Jérôme Kaeslin ◽  
Alexander Gundlach-Graham ◽  
Bodo Hattendorf ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Time Resolution ◽  
Inductively Coupled Plasma ◽  
High Time Resolution ◽  
Reaction Cell ◽  
Time Resolved ◽  
Inductively Coupled ◽  
Flight Mass Spectrometry ◽  
Transit Times

High time resolution of TOFMS allows to study variations in ion transit times caused by collisions within the pressurized cell.

Electron density measurement using a partially covered hairpin resonator in an inductively coupled plasma

2020 ◽  
Vol 91 (11) ◽  
pp. 113502
Author(s):  
Xingchen Fan ◽  
Yhoshua Wug ◽  
Jia Han ◽  
Patrick Pribyl ◽  
Troy Carter
Keyword(s):  
Electron Density ◽  
Inductively Coupled Plasma ◽  
Density Measurement ◽  
Inductively Coupled ◽  
Hairpin Resonator
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