Local epitaxial-like templating effects and grain size distribution in atomic layer deposited Hf0.5Zr0.5O2 thin film ferroelectric capacitors

2021 ◽  
Vol 119 (9) ◽  
pp. 092901
Author(s):  
S. F. Lombardo ◽  
M. Tian ◽  
K. Chae ◽  
J. Hur ◽  
N. Tasneem ◽  
...  

1998 ◽  
Vol 523 ◽  
Author(s):  
Wei Chen ◽  
Joe Hooker ◽  
Kathy Monarch ◽  
Peter Fejes ◽  
Peir Chu

AbstractMicrostructures of Barium Strontium Titanate (Ba, Sr)TiO3 [BST] thin film play an important role in determining the electrical properties of BST. In particular, it is found that the grain size distribution as a function of deposition conditions correlates with the dielectric constant of BST film. Traditionally, Transmission Electron Microscopy (TEM) provides an accurate method for determining microstructures such as interface structure between BST and electrodes and BST grain size distribution. However, TEM analysis relies heavily upon successful sample preparation, and film adhesion for BST proves to be a difficult problem to overcome for successful sample preparation. With the state of the art Scanning Electron Microscope (SEM) and Atomic Force Microscopy (AFM), useful information can be obtained for BST and electrode microstructures requiring little or no sample preparation. A good correlation among TEM, SEM and AFM techniques is achieved which allows useful information of BST grain size distribution to he obtained via SEM and AFM analyses. Power spectral density (PSD) analysis of contrast enhanced AFM images proves to be an efficient method for estimating BST grain size distribution.







1985 ◽  
Vol 63 (6) ◽  
pp. 716-718 ◽  
Author(s):  
S. Chandrasekhar ◽  
S. Martinuzzi ◽  
F. Z. Nataren

For low Zn concentrations i.e., x < 0.1, the performance of the Cd1−xZnxS–Cu2S solar cells can be improved by reducing the grain-boundary recombination. This has been achieved by growing well-oriented, homogeneous, ternary compound films.It was found that the Cd1−xZnxS films grown on the polycrystalline CdS films achieved the same larger grain size as that of the base layer. These films had fewer misorientations and had a unimodal grain-size distribution. There is a continuity in the crystallites from the CdS base to the Cd1−xZnxS overlayer, and the bifilms thus grown are less resistive than Cd1−xZnxS single layers.



1999 ◽  
Vol 35 (5) ◽  
pp. 2712-2714 ◽  
Author(s):  
Hong Zhou ◽  
H.N. Bertram ◽  
M.F. Doerner ◽  
M. Mirzamaani






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