Local epitaxial-like templating effects and grain size distribution in atomic layer deposited Hf0.5Zr0.5O2 thin film ferroelectric capacitors
Keyword(s):
2002 ◽
Vol 239
(1-3)
◽
pp. 385-389
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Keyword(s):
1994 ◽
Vol 23
(9)
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pp. 889-892
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Keyword(s):
1999 ◽
Vol 35
(5)
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pp. 2712-2714
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1997 ◽
Vol 21
(S_2_PMRC_97_2)
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pp. S2_185-188
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