Direct writing of divacancy centers in silicon carbide by femtosecond laser irradiation and subsequent thermal annealing
Keyword(s):
2012 ◽
Vol 29
(4)
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pp. 046101
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Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching
2014 ◽
Vol 289
◽
pp. 529-532
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Keyword(s):
Keyword(s):
2014 ◽
Vol 22
(1)
◽
pp. 15-18
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2008 ◽
Vol 460
(1-2)
◽
pp. 590-593
◽
Keyword(s):
Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching
2014 ◽
Vol 31
(3)
◽
pp. 037901
◽
Keyword(s):
2016 ◽
Vol 14
(2)
◽
pp. 021407-21410
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Keyword(s):