Design of high-Q Thin Film Bulk Acoustic resonator using dual-mode reflection

2014 ◽  
Author(s):  
Ngoc Nguyen ◽  
Agne Johannessen ◽  
Ulrik Hanke
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Dual Mode ◽  
High Q ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Investigation of Liquid Sensor Using a Dual-Mode Thin Film Bulk Acoustic Resonator (FBAR) Combined with Au/Cr Layers

2011 ◽  
Vol 201-203 ◽  
pp. 700-703
Author(s):  
Wei Tsai Chang ◽  
Ying Chung Chen ◽  
Re Ching Lin ◽  
Kuo Sheng Kao ◽  
Jia Ming Jiang ◽  
...  
Keyword(s):  
Thin Film ◽  
High Sensitivity ◽  
Rf Magnetron Sputtering ◽  
Acoustic Resonator ◽  
Zno Thin Film ◽  
Dual Mode ◽  
Resonant Frequencies ◽  
Film Bulk Acoustic Resonator ◽  
Shear Modes ◽  
Film Bulk

This paper reports a dual-mode film bulk acoustic resonator (FBAR) device combined with Au/Cr layer to construct a liquid sensor. In order to obtain a liquid sensor with high sensitivity, the dual-mode FBAR with piezoelectric layer of ZnO thin film has been investigated. The dual-mode characteristics of FBAR appeared by off-axis deposition of ZnO thin film with the RF magnetron sputtering. The top and bottom electrodes consisted of a titanium (Ti) and a platinum (Pt) layers were deposited by dual-gun DC sputtering system. Owing to the chemical stability, the Pt layer is not only a perfect bottom electrode but also an etching stop layer. The gold layer (Au) is adopted for the formation of sensory area. In order to improve the adhesion between the Au layer and the Pt layer, a chromium (Cr) layer was deposited onto the backside cavity of the FBAR device before the Au layer was deposited by a DC sputter. The Au/Cr layer is used as the binding layer with analytes of DI water because of its hydrophile. The frequency response is measured using an HP8720 network analyzer and a CASCADE probe station. The resonant frequencies of longitude and shear modes in air appear at 2262.5 MHz and 1012.5MHz, whereas the resonant frequencies of longitude and shear modes in DI water are 2062.5 MHz and 955MHz, respectively.

scholarly journals The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films

2013 ◽  
Vol 2013 ◽  
pp. 1-8 ◽  
Author(s):  
Ying-Chung Chen ◽  
Wei-Tsai Chang ◽  
Kuo-Sheng Kao ◽  
Chun-Hung Yang ◽  
Chien-Chuan Cheng
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Rf Magnetron Sputtering ◽  
Acoustic Resonator ◽  
Quality Factors ◽  
Dual Mode ◽  
Liquid Loading ◽  
Film Bulk Acoustic Resonator ◽  
Shear Modes ◽  
Film Bulk

Dual-mode thin film bulk acoustic resonator (TFBAR) devices are fabricated with c-axis tilted AlN films. To fabricate dual-mode TFBAR devices, the off-axis RF magnetron sputtering method for the growth of tilted piezoelectric AlN thin films is adopted. In this report, the AlN thin films are deposited with tilting angles of 15° and 23°. The frequency response of the TFBAR device with 23° tilted AlN thin film is measured to reveal its ability to provide dual-mode resonance. The sensitivities of the longitudinal and shear modes to mass loading are calculated to be 2295 Hz cm2/ng and 1363 Hz cm2/ng with the mechanical quality factors of 480 and 287, respectively. The sensitivities of the longitudinal and shear modes are calculated to be 0 and 15 Hz cm2/μg for liquid loading.

Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

2005 ◽  
Vol 69 (1) ◽  
pp. 323-332 ◽  
Author(s):  
Heechul Lee ◽  
Jaeyeong Park ◽  
Kyunghak Lee ◽  
Youngjoon Ko ◽  
Jonguk Bu
Keyword(s):  
Acoustic Resonator ◽  
High Q ◽  
Silicon Bulk ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Multifunctional ZnO-Based Thin-Film Bulk Acoustic Resonator for Biosensors

2009 ◽  
Vol 38 (8) ◽  
pp. 1605-1611 ◽  
Author(s):  
Ying Chen ◽  
Pavel I. Reyes ◽  
Ziqing Duan ◽  
Gaurav Saraf ◽  
Richard Wittstruck ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk
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