Ultrafast fabrication of high-aspect-ratio macropores in P-type silicon: toward the mass production of microdevices
2018 ◽
Vol 6
(11)
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pp. 648-654
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1999 ◽
Vol 3
(10)
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pp. 489
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2012 ◽
Vol 12
(4)
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pp. 3567-3570
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2014 ◽
Vol 24
(12)
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pp. 125026
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2011 ◽
Vol 269
(20)
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pp. 2457-2461
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Keyword(s):
2013 ◽
Vol 397-400
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pp. 47-51
Keyword(s):
Keyword(s):
2021 ◽