Measurements and semi-empirical model describing the onset of powder formation as a function of process parameters in an RF silane–hydrogen discharge
2005 ◽
Vol 38
(14)
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pp. 2382-2389
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2021 ◽
pp. 095440892110158
Keyword(s):
2021 ◽
Vol 212
◽
pp. 104606
Keyword(s):
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