Steady-state direct-current plasma immersion ion implantation using a multipolar magnetic field electron cyclotron resonance plasma source

2001 ◽  
Vol 19 (6) ◽  
pp. 2889 ◽  
Author(s):  
Xuchu Zeng ◽  
Honghui Tong ◽  
Ricky King-Yu Fu ◽  
Paul K. Chu ◽  
Zejin Xu ◽  
...  
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