Ion-cutting of Si onto glass by pulsed and direct-current plasma immersion ion implantation

2003 ◽  
Vol 21 (5) ◽  
pp. 2109 ◽  
Author(s):  
F. Lu ◽  
D. Qiao ◽  
M. Cai ◽  
P. K. L. Yu ◽  
S. S. Lau ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation

Control of implantation area in direct-current plasma immersion ion implantation (DC-PIII)

2003 ◽  
Vol 31 (3) ◽  
pp. 356-361 ◽  
Author(s):  
R.K. Fu ◽  
Pai Peng ◽  
Xuchu Zeng ◽  
D.T. Kwok ◽  
P.K. Chu
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation

Quasi-direct current plasma immersion ion implantation

2001 ◽  
Vol 79 (19) ◽  
pp. 3044-3046 ◽  
Author(s):  
Xuchu Zeng ◽  
Ricky K. Y. Fu ◽  
Dixon T. K. Kwok ◽  
Paul K. Chu
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation

Non-Uniformity of Ion Implantation in Direct-Current Plasma Immersion Ion Implantation

2010 ◽  
Vol 27 (7) ◽  
pp. 075201
Author(s):  
Liu Cheng-Sen ◽  
Wang De-Zhen ◽  
Fan Yu-Jia ◽  
Zhang Nan ◽  
Guan Li ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation
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