Control of implantation area in direct-current plasma immersion ion implantation (DC-PIII)

IEEE Transactions on Plasma Science ◽

10.1109/tps.2003.811645 ◽

2003 ◽

Vol 31 (3) ◽

pp. 356-361 ◽

Author(s):

R.K. Fu ◽

Pai Peng ◽

Xuchu Zeng ◽

D.T. Kwok ◽

P.K. Chu

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Current control for magnetized plasma in direct-current plasma-immersion ion implantation

Applied Physics Letters ◽

10.1063/1.1564638 ◽

2003 ◽

Vol 82 (13) ◽

pp. 2014-2016 ◽

Author(s):

Deli Tang ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Current Control ◽

Magnetized Plasma ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Ion-cutting of Si onto glass by pulsed and direct-current plasma immersion ion implantation

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1609477 ◽

2003 ◽

Vol 21 (5) ◽

pp. 2109 ◽

Author(s):

F. Lu ◽

D. Qiao ◽

M. Cai ◽

P. K. L. Yu ◽

S. S. Lau ◽

...

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Steady-state direct-current plasma immersion ion implantation using a multipolar magnetic field electron cyclotron resonance plasma source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1412653 ◽

2001 ◽

Vol 19 (6) ◽

pp. 2889 ◽

Author(s):

Xuchu Zeng ◽

Honghui Tong ◽

Ricky King-Yu Fu ◽

Paul K. Chu ◽

Zejin Xu ◽

...

Keyword(s):

Magnetic Field ◽

Steady State ◽

Ion Implantation ◽

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation ◽

Resonance Plasma

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Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/43/9/095203 ◽

2010 ◽

Vol 43 (9) ◽

pp. 095203 ◽

Author(s):

Dixon T K Kwok ◽

Jianhui Li ◽

Xiaobo Ma ◽

Paul K Chu

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Electron Distribution ◽

Three Dimensional ◽

Hybrid Particle ◽

Particle In Cell ◽

Three Dimensional Objects ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Quasi-direct current plasma immersion ion implantation

Applied Physics Letters ◽

10.1063/1.1415404 ◽

2001 ◽

Vol 79 (19) ◽

pp. 3044-3046 ◽

Author(s):

Xuchu Zeng ◽

Ricky K. Y. Fu ◽

Dixon T. K. Kwok ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Progress in direct-current plasma immersion ion implantation and recent applications of plasma immersion ion implantation and deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.03.073 ◽

2013 ◽

Vol 229 ◽

pp. 2-11 ◽

Author(s):

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Non-Uniformity of Ion Implantation in Direct-Current Plasma Immersion Ion Implantation

Chinese Physics Letters ◽

10.1088/0256-307x/27/7/075201 ◽

2010 ◽

Vol 27 (7) ◽

pp. 075201

Author(s):

Liu Cheng-Sen ◽

Wang De-Zhen ◽

Fan Yu-Jia ◽

Zhang Nan ◽

Guan Li ◽

...

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Steady state direct current plasma immersion ion implantation (PIII) using a grounded conducting grid

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) ◽

10.1109/plasma.2000.854554 ◽

2002 ◽

Author(s):

D.T.K. Kwok ◽

X. Zeng ◽

C. Chan ◽

P.K. Chu

Keyword(s):

Steady State ◽

Ion Implantation ◽

Direct Current ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Three-dimensional quasi direct current plasma immersion ion implantation into biomedical nickel-titanium shape memory alloy rod

2009 IEEE International Conference on Plasma Science - Abstracts ◽

10.1109/plasma.2009.5227289 ◽

2009 ◽

Author(s):

Dixon T. K. Kwok ◽

Martin Schulz ◽

Paul K. Chu

Keyword(s):

Shape Memory Alloy ◽

Ion Implantation ◽

Shape Memory ◽

Direct Current ◽

Three Dimensional ◽

Nickel Titanium ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Three-Dimensional Quasi-Direct-Current Plasma Immersion Ion Implantation Into Biomedical Nickel–Titanium Shape Memory Alloy Rod

IEEE Transactions on Plasma Science ◽

10.1109/tps.2009.2031139 ◽

2009 ◽

Vol 37 (11) ◽

pp. 2245-2249 ◽

Author(s):

M. Schulz ◽

D.T.-K. Kwok ◽

Tao Hu ◽

P.K. Chu

Keyword(s):

Shape Memory Alloy ◽

Ion Implantation ◽

Shape Memory ◽

Direct Current ◽

Three Dimensional ◽

Nickel Titanium ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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