High-JcYBa2Cu3O7−δsuperconducting film grown by laser-assisted chemical vapor deposition using a single liquid source and its microstructure

A large magnetoresistance change (ΔR/RH) of −550% has been observed at 270 K in (La0.8Ca0.2)MnO3 thin films. The films were prepared in situ on LaAlO3 substrates by single-liquid-source metal-organic chemical vapor deposition. M(thd)n (M = La, Ca, and Mn, and n = 2, 3) were dissolved together in an organic solution and used as precursors for the deposition of (La0.8Ca0.2)MnO3 thin films. Deposition was conducted at an oxygen partial pressure of 1.2 Torr and a substrate temperature ranging from 600 °C to 700 °C. The mechanism for the large magnetoresistance change in this manganese oxide is briefly discussed.

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Liquid source chemical vapor deposition of high-dielectric-constant (Ba, Sr)TiO3 films

Electrical Engineering in Japan ◽

10.1002/(sici)1520-6416(199810)125:1<47::aid-eej6>3.0.co;2-j ◽

1998 ◽

Vol 125 (1) ◽

pp. 47-54 ◽

Cited By ~ 1

Author(s):

Takaaki Kawahara ◽

Mikio Yamamuka ◽

Akimasa Yuuki ◽

Kouichi Ono

Keyword(s):

Dielectric Constant ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

High Dielectric Constant ◽

Chemical Vapor ◽

Liquid Source ◽

High Dielectric

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Metalorganic Chemical Vapor Deposition of Complex Metal Oxide Thin Films by Liquid Source Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.2520 ◽

1996 ◽

Vol 35 (Part 1, No. 4B) ◽

pp. 2520-2525 ◽

Cited By ~ 44

Author(s):

Peter C. Van Buskirk ◽

Steve M. Bilodeau ◽

Jeffrey F. Roeder ◽

Peter S. Kirlin

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Metal Oxide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metal Oxide Thin Films ◽

Liquid Source ◽

Complex Metal Oxide ◽

Metalorganic Chemical

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Chemical Vapor Deposition of Epmtaxial BaTiO3 Films for Frequency Doubling Devices

MRS Proceedings ◽

10.1557/proc-310-119 ◽

1993 ◽

Vol 310 ◽

Cited By ~ 3

Author(s):

Peter C. Van Buskirk ◽

Gregory T. Stauf ◽

Robin Gardiner ◽

Peter S. Kirlin ◽

B. Bihari ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

High Efficiency ◽

Second Harmonic ◽

Frequency Doubling ◽

Chemical Vapor ◽

Ferroelectric Materials ◽

Solid State Lasers ◽

Second Harmonic Generation Efficiency ◽

Liquid Source

AbstractFerroelectric materials such as BaTiO3 are notable for their nonlinear optical and electrical properties. Optical frequency doubling in thin films integrated with compact semiconductor laser pumped solid state lasers is an attractive candidate for high efficiency generation of blue light. Chemical vapor deposition (CVD) using a single liquid source has been used to grow BaTiO3 films on MgO. X-ray diffraction in the pole figure configuration indicates the films to be epitaxial, and rocking curves had FWHM ≈ 0.7°. An optical scatterometer (λ = 633 nm.) has been used to identify deposition conditions that result in the lowest scatter losses. This paper describes these results as well as waveguide designs to enhance the second harmonic generation efficiency in epitaxial BaTiO3 films on MgO.

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