Ellipsometric and Raman spectroscopic study of nanocrystalline silicon thin films prepared by a rf magnetron sputtering technique

2008 ◽  
Vol 20 (44) ◽  
pp. 445221 ◽  
Author(s):  
Y Bouizem ◽  
C Abbes ◽  
J D Sib ◽  
D Benlakehal ◽  
R Baghdad ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Spectroscopic Study ◽  
Rf Magnetron Sputtering ◽  
Nanocrystalline Silicon ◽  
Raman Spectroscopic ◽  
Raman Spectroscopic Study ◽  
Silicon Thin Films

Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuouswave Laser

2011 ◽  
Vol 40 (11) ◽  
pp. 1657-1661
Author(s):  
段国平 DUAN Guoping ◽  
陈俊领 CHEN Junling ◽  
韩俊鹤 HAN Junhe ◽  
黄明举 HUANG Mingju
Keyword(s):  
Thin Films ◽  
Spectroscopic Study ◽  
Amorphous Silicon ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Raman Spectroscopic ◽  
Raman Spectroscopic Study ◽  
Silicon Thin Films ◽  
Wave Laser

Nanocrystalline silicon thin films prepared by radiofrequency magnetron sputtering

2002 ◽  
Vol 403-404 ◽  
pp. 91-96 ◽  
Author(s):  
C. Gonçalves ◽  
S. Charvet ◽  
A. Zeinert ◽  
M. Clin ◽  
K. Zellama
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Nanocrystalline Silicon ◽  
Silicon Thin Films

Spectroscopic study on amorphous tantalum oxynitride thin films prepared by reactive gas-timing RF magnetron sputtering

2019 ◽  
Vol 492 ◽  
pp. 99-107 ◽  
Author(s):  
T. Lertvanithphol ◽  
W. Rakreungdet ◽  
C. Chananonnawathorn ◽  
P. Eiamchai ◽  
S. Limwichean ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Spectroscopic Study ◽  
Rf Magnetron Sputtering ◽  
Reactive Gas

scholarly journals The Structure and Photoluminescence of Erbium-Doped Nanocrystalline Silicon Thin Films Produced by Reactive Magnetron Sputtering

2001 ◽  
Vol 82-84 ◽  
pp. 637-644 ◽  
Author(s):  
M.Fátima Cerqueira ◽  
Maria Losurdo ◽  
M.V. Stepikhova ◽  
Olinda Conde ◽  
M.M. Giangregorio ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Nanocrystalline Silicon ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Silicon Thin Films ◽  
Erbium Doped
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