A miniature, all-electrostatic, field emission electron column for surface analytical microscopy

1997 ◽  
Vol 8 (5) ◽  
pp. 536-545 ◽  
Author(s):  
R H Roberts ◽  
M M El Gomati ◽  
J Kudjoe ◽  
I R Barkshire ◽  
S J Bean ◽  
...  
Author(s):  
Y. Harada ◽  
T. Goto ◽  
H. Koike ◽  
T. Someya

Since phase contrasts of STEM images, that is, Fresnel diffraction fringes or lattice images, manifest themselves in field emission scanning microscopy, the mechanism for image formation in the STEM mode has been investigated and compared with that in CTEM mode, resulting in the theory of reciprocity. It reveals that contrast in STEM images exhibits the same properties as contrast in CTEM images. However, it appears that the validity of the reciprocity theory, especially on the details of phase contrast, has not yet been fully proven by the experiments. In this work, we shall investigate the phase contrast images obtained in both the STEM and CTEM modes of a field emission microscope (100kV), and evaluate the validity of the reciprocity theory by comparing the experimental results.


Author(s):  
N. Tamura ◽  
T. Goto ◽  
Y. Harada

On account of its high brightness, the field emission electron source has the advantage that it provides the conventional electron microscope with highly coherent illuminating system and that it directly improves the, resolving power of the scanning electron microscope. The present authors have reported some results obtained with a 100 kV field emission electron microscope.It has been proven, furthermore, that the tungsten emitter as a temperature field emission source can be utilized with a sufficient stability under a modest vacuum of 10-8 ~ 10-9 Torr. The present paper is concerned with an extension of our study on the characteristics of the temperature field emitters.


1989 ◽  
Vol 50 (C8) ◽  
pp. C8-507-C8-512
Author(s):  
O. NISHIKAWA ◽  
H. KOYAMA ◽  
N. KODAMA ◽  
M. TOMITORI

2014 ◽  
Vol 140 ◽  
pp. 37-43 ◽  
Author(s):  
Masaki Mukai ◽  
Judy S. Kim ◽  
Kazuya Omoto ◽  
Hidetaka Sawada ◽  
Atsushi Kimura ◽  
...  

Author(s):  
Robert Lawrowski ◽  
Matthias Hausladen ◽  
Philipp Buchner ◽  
Rupert Schreiner

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