Fabrication and characterization of micromachined quartz-crystal cantilever for force sensing

2005 ◽  
Vol 15 (12) ◽  
pp. 2426-2432 ◽  
Author(s):  
Yu-Ching Lin ◽  
Takahito Ono ◽  
Masayoshi Esashi
Keyword(s):  
Quartz Crystal ◽  
Force Sensing ◽  
Fabrication And Characterization

Fabrication and Characterization of Diamond Quartz Crystal Microbalance Electrode

2002 ◽  
Vol 149 (11) ◽  
pp. H179 ◽  
Author(s):  
Yanrong Zhang ◽  
Shunsuke Asahina ◽  
Sachio Yoshihara ◽  
Takashi Shirakashi
Keyword(s):  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Fabrication And Characterization

A SOI-MEMS-Based Single Axis Active Probe for Cellular Force Sensing and Cell Manipulation

2010 ◽  
Author(s):  
Li Zhang ◽  
Jingyan Dong
Keyword(s):  
Stage Structure ◽  
Silicon On Insulator ◽  
Cell Manipulation ◽  
Force Sensing ◽  
Deep Reactive Ion Etching ◽  
Active Probing ◽  
Comb Drives ◽  
Active Probe ◽  
Fabrication And Characterization

This paper presents the design, analysis, fabrication, and characterization of an electrostatically driven single axis active probing device for cellular force sensing and cell manipulation applications. The active probe is actuated by linear comb driver to create the motion in the probing direction. Both actuation and sensing comb drives are designed for the probing stage. The sensing comb structures enable us to sense the probe displacement when it is actuated, which enables application of force balanced sensing. The designed active probing device has an overall size of 5 mm × 4.5 mm, is fabricated on a silicon-on-insulator (SOI) substrate through surface micromachining technologies and deep reactive-ion etching (DRIE) process. The probe stage structure is fabricated on the 10-μm-thick device layer of SOI wafer. The handle layer beneath probe stage is etched away by DRIE process to decrease the film damping between the stage and the handle wafer thus achieving high quality factor. The proposed single axis probe is aimed at sensing cellular force which ranges from pN to μN and cell manipulation applications.

scholarly journals Comparison of Performances of Flexible Tailor-Made Force Sensing Resistors Fabricated Using Inkjet and Xurographic Techniques

2019 ◽  
Vol 2019 ◽  
pp. 1-8
Author(s):  
Goran Stojanović ◽  
Milan Radovanović ◽  
Dragana Vasiljević ◽  
Tijana Kojić ◽  
Bojana Pivaš ◽  
...  
Keyword(s):  
Applied Force ◽  
Force Sensing ◽  
Life Force ◽  
Inkjet Printer ◽  
Fabrication And Characterization ◽  
Personalized Approach ◽  
Set Up ◽  
Measuring Force

The force is one of the parameters very often measured in our life. Force sensing resistors (FSRs) can be successfully used for measuring force, especially that they can be applied in dentistry for measuring bite forces. However, it is very difficult to apply commercial FSRs for accurate measurement of bite forces and to ensure personalized approach to each patient. Because of that, design, fabrication, and characterization of tailor-made force sensing resistors intended for application in dental medicine are presented in this paper. We designed two FSRs, one with two active areas and one with four active areas (for teeth of higher volume–molars). Two different fabrication processes were applied: first additive, using inkjet printer and silver as material for conductive segments, and second subtractive, using cutter, and gold as a material for manufacturing of interdigitated structure of FSR. Performances of these FSRs have been compared, measuring resistance as a function of applied force, using in-house developed experimental set-up with an articulator.

scholarly journals Fabrication and Characterization of Piezoelectric Paper Based Device for Touch and Force Sensing Applications

2016 ◽  
Vol 168 ◽  
pp. 688-691 ◽  
Author(s):  
Sepehr Emamian ◽  
Binu B. Narakathu ◽  
Amer A. Chlaihawi ◽  
Massood Z. Atashbar
Keyword(s):  
Force Sensing ◽  
Sensing Applications ◽  
Fabrication And Characterization

Fabrication and Characterization of Polyoxometalate based Nano-hybrids: Evaluation of their role in Biological Activity

2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  
Keyword(s):  
Biological Activity ◽  
Fabrication And Characterization

Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing

2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa
Keyword(s):  
Tactile Sensing ◽  
Fabrication And Characterization

Fabrication and Characterization of Chain-like Arrangement of Gold Nanoparticles using Nanotemplates

2015 ◽  
Vol 135 (11) ◽  
pp. 474-475
Author(s):  
Koji Sugano ◽  
Ryoji Hiraoka ◽  
Toshiyuki Tsuchiya ◽  
Osamu Tabata
Keyword(s):  
Gold Nanoparticles ◽  
Fabrication And Characterization
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