Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor
2006 ◽
Vol 16
(6)
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pp. S45-S53
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2016 ◽
Vol 25
(1)
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pp. 188-196
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2008 ◽
Vol 18
(6)
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pp. 064001
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2009 ◽
Vol 156
(1)
◽
pp. 28-35
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