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A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb drive
Journal of Micromechanics and Microengineering
◽
10.1088/0960-1317/19/3/035011
◽
2009
◽
Vol 19
(3)
◽
pp. 035011
◽
Cited By ~ 29
Author(s):
S Kang
◽
H C Kim
◽
K Chun
Keyword(s):
Rf Mems
◽
Low Loss
◽
Comb Drive
◽
Rf Mems Switch
◽
Mems Switch
Download Full-text
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Cited By
References
A K-band switched-line phase shifter using novel low-voltage low-loss RF-MEMS switch
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)
◽
10.1109/rsm.2017.8069125
◽
2017
◽
Cited By ~ 3
Author(s):
Li-Ya Ma
◽
Norhayati Soin
◽
Anis Nurashikin Nordin
Keyword(s):
Phase Shifter
◽
Rf Mems
◽
Low Voltage
◽
Low Loss
◽
Rf Mems Switch
◽
Mems Switch
◽
K Band
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1115 A miniature and low-loss RF MEMS switch
The Proceedings of the Conference on Information Intelligence and Precision Equipment IIP
◽
10.1299/jsmeiip.2007.49
◽
2007
◽
Vol 2007
(0)
◽
pp. 49-51
Author(s):
Shinnosuke Soda
◽
Sang-Seok Lee
◽
Shinichi Izuo
◽
Tamotsu Nishino
◽
Yukihisa Yoshida
◽
...
Keyword(s):
Rf Mems
◽
Low Loss
◽
Rf Mems Switch
◽
Mems Switch
Download Full-text
Additively Manufactured, Low Loss 20 GHz DC Contact RF MEMS Switch Using Laterally Actuated, Fix-Free Beam
10.1109/ims19712.2021.9574805
◽
2021
◽
Author(s):
Omer F. Firat
◽
Jing Wang
◽
Thomas M. Weller
Keyword(s):
Rf Mems
◽
Low Loss
◽
Rf Mems Switch
◽
Mems Switch
◽
Free Beam
Download Full-text
Low-loss SPDT metal-to-metal contacts RF MEMS switch operated by electrostatic actuation
10.1117/12.638510
◽
2005
◽
Cited By ~ 2
Author(s):
T. Seki
◽
Y. Uno
◽
K. Narise
◽
T. Masuda
◽
K. Inoue
◽
...
Keyword(s):
Rf Mems
◽
Electrostatic Actuation
◽
Metal Contacts
◽
Low Loss
◽
Rf Mems Switch
◽
Mems Switch
Download Full-text
Compact low-loss high-performance single-pole six-throw RF MEMS switch design and modeling for DC to 6 GHz
Microsystem Technologies
◽
10.1007/s00542-015-2411-0
◽
2015
◽
Vol 21
(11)
◽
pp. 2387-2396
◽
Cited By ~ 9
Author(s):
Tejinder Singh
◽
Kamal J. Rangra
Keyword(s):
High Performance
◽
Rf Mems
◽
Low Loss
◽
Rf Mems Switch
◽
Mems Switch
◽
Switch Design
Download Full-text
Low Loss Ohmic Type Piezoelectric Actuated RF MEMS Switch Designed with PZT and ZnO
2018 IEEE Electron Devices Kolkata Conference (EDKCON)
◽
10.1109/edkcon.2018.8770442
◽
2018
◽
Author(s):
Suvendu Nayak
◽
Jogesh Chandra Dash
◽
Himanshu Diwakar
Keyword(s):
Rf Mems
◽
Low Loss
◽
Rf Mems Switch
◽
Mems Switch
Download Full-text
A Novel SPDT Rotary RF MEMS Switch for Low Loss and Power Efficient Signal Routing
IETE Journal of Research
◽
10.1080/03772063.2015.1083896
◽
2015
◽
Vol 62
(1)
◽
pp. 68-80
◽
Cited By ~ 12
Author(s):
Afshin Kashani Ilkhechi
◽
Hadi Mirzajani
◽
Esmaeil Najafi Aghdam
◽
Habib Badri Ghavifekr
Keyword(s):
Rf Mems
◽
Low Loss
◽
Rf Mems Switch
◽
Power Efficient
◽
Mems Switch
◽
Signal Routing
Download Full-text
Design of a 20 GHz Low Loss Ohmic Contact RF MEMS Switch
2007 IEEE/MTT-S International Microwave Symposium
◽
10.1109/mwsym.2007.380448
◽
2007
◽
Cited By ~ 11
Author(s):
David A. Goins
◽
Richard D. Nelson
◽
John S. McKillop
Keyword(s):
Ohmic Contact
◽
Rf Mems
◽
Low Loss
◽
Rf Mems Switch
◽
Mems Switch
Download Full-text
A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications
Microsystem Technologies
◽
10.1007/s00542-017-3684-2
◽
2018
◽
Vol 24
(7)
◽
pp. 3019-3032
◽
Cited By ~ 5
Author(s):
Parviz Zolfaghari
◽
Vahid Arzhang
◽
Mojtaba Zolfaghari
Keyword(s):
Low Power
◽
Rf Mems
◽
Low Loss
◽
Rf Mems Switch
◽
Power Efficient
◽
Mems Switch
◽
Thermally Actuated
Download Full-text
Fabrication of a push-pull type electrostatic comb-drive RF MEMS switch
2012 IEEE Sensors
◽
10.1109/icsens.2012.6411087
◽
2012
◽
Cited By ~ 2
Author(s):
Li-Feng Wang
◽
Lei Han
◽
Jie-Ying Tang
◽
Qing-An Huang
Keyword(s):
Rf Mems
◽
Comb Drive
◽
Rf Mems Switch
◽
Mems Switch
Download Full-text
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