1115 A miniature and low-loss RF MEMS switch

The Proceedings of the Conference on Information Intelligence and Precision Equipment IIP ◽

10.1299/jsmeiip.2007.49 ◽

2007 ◽

Vol 2007 (0) ◽

pp. 49-51

Author(s):

Shinnosuke Soda ◽

Sang-Seok Lee ◽

Shinichi Izuo ◽

Tamotsu Nishino ◽

Yukihisa Yoshida ◽

...

Keyword(s):

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

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A K-band switched-line phase shifter using novel low-voltage low-loss RF-MEMS switch

2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) ◽

10.1109/rsm.2017.8069125 ◽

2017 ◽

Author(s):

Li-Ya Ma ◽

Norhayati Soin ◽

Anis Nurashikin Nordin

Keyword(s):

Phase Shifter ◽

Rf Mems ◽

Low Voltage ◽

Low Loss ◽

Rf Mems Switch ◽

Mems Switch ◽

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A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb drive

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/19/3/035011 ◽

2009 ◽

Vol 19 (3) ◽

pp. 035011 ◽

Author(s):

S Kang ◽

H C Kim ◽

K Chun

Keyword(s):

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

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Additively Manufactured, Low Loss 20 GHz DC Contact RF MEMS Switch Using Laterally Actuated, Fix-Free Beam

10.1109/ims19712.2021.9574805 ◽

2021 ◽

Author(s):

Omer F. Firat ◽

Jing Wang ◽

Thomas M. Weller

Keyword(s):

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

Mems Switch ◽

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Low-loss SPDT metal-to-metal contacts RF MEMS switch operated by electrostatic actuation

10.1117/12.638510 ◽

2005 ◽

Author(s):

T. Seki ◽

Y. Uno ◽

K. Narise ◽

T. Masuda ◽

K. Inoue ◽

...

Keyword(s):

Rf Mems ◽

Electrostatic Actuation ◽

Metal Contacts ◽

Low Loss ◽

Rf Mems Switch ◽

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Compact low-loss high-performance single-pole six-throw RF MEMS switch design and modeling for DC to 6 GHz

Microsystem Technologies ◽

10.1007/s00542-015-2411-0 ◽

2015 ◽

Vol 21 (11) ◽

pp. 2387-2396 ◽

Author(s):

Tejinder Singh ◽

Kamal J. Rangra

Keyword(s):

High Performance ◽

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

Mems Switch ◽

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Low Loss Ohmic Type Piezoelectric Actuated RF MEMS Switch Designed with PZT and ZnO

2018 IEEE Electron Devices Kolkata Conference (EDKCON) ◽

10.1109/edkcon.2018.8770442 ◽

2018 ◽

Author(s):

Suvendu Nayak ◽

Jogesh Chandra Dash ◽

Himanshu Diwakar

Keyword(s):

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

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A Novel SPDT Rotary RF MEMS Switch for Low Loss and Power Efficient Signal Routing

IETE Journal of Research ◽

10.1080/03772063.2015.1083896 ◽

2015 ◽

Vol 62 (1) ◽

pp. 68-80 ◽

Author(s):

Afshin Kashani Ilkhechi ◽

Hadi Mirzajani ◽

Esmaeil Najafi Aghdam ◽

Habib Badri Ghavifekr

Keyword(s):

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

Power Efficient ◽

Mems Switch ◽

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Design of a 20 GHz Low Loss Ohmic Contact RF MEMS Switch

2007 IEEE/MTT-S International Microwave Symposium ◽

10.1109/mwsym.2007.380448 ◽

2007 ◽

Author(s):

David A. Goins ◽

Richard D. Nelson ◽

John S. McKillop

Keyword(s):

Ohmic Contact ◽

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

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A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications

Microsystem Technologies ◽

10.1007/s00542-017-3684-2 ◽

2018 ◽

Vol 24 (7) ◽

pp. 3019-3032 ◽

Author(s):

Parviz Zolfaghari ◽

Vahid Arzhang ◽

Mojtaba Zolfaghari

Keyword(s):

Low Power ◽

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

Power Efficient ◽

Mems Switch ◽

Thermally Actuated

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Development of a large-force low-loss metal-contact RF MEMS switch

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.02.016 ◽

2006 ◽

Vol 132 (2) ◽

pp. 683-688 ◽

Author(s):

T. Seki ◽

Y. Uno ◽

K. Narise ◽

T. Masuda ◽

K. Inoue ◽

...

Keyword(s):

Rf Mems ◽

Metal Contact ◽

Low Loss ◽

Rf Mems Switch ◽

Mems Switch ◽

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