Investigation of atomic oxygen density in a capacitively coupled O2/SF6discharge using two-photon absorption laser-induced fluorescence spectroscopy and a Langmuir probe
2013 ◽
Vol 22
(4)
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pp. 045013
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2014 ◽
Vol 4
(3)
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pp. 416-433
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2014 ◽
Vol 23
(6)
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pp. 065006
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2016 ◽
Vol 25
(4)
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pp. 045023
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2017 ◽
Vol 26
(5)
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pp. 055004
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1994 ◽
Vol 33
(Part 1, No. 7B)
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pp. 4329-4334
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2017 ◽
Vol 07
(04)
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pp. 93-115
2016 ◽
2016 ◽
Vol 25
(6)
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pp. 06LT03
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