Two-dimensional hybrid model simulation and validation for radio frequency inductively coupled oxygen plasma

A semianalytic radio frequency sheath model integrated into a two-dimensional hybrid model for plasma processing reactors

Journal of Applied Physics ◽

10.1063/1.364199 ◽

1997 ◽

Vol 81 (2) ◽

pp. 569-577 ◽

Cited By ~ 63

Author(s):

Michael J. Grapperhaus ◽

Mark J. Kushner

Keyword(s):

Radio Frequency ◽

Hybrid Model ◽

Plasma Processing ◽

Two Dimensional ◽

Plasma Processing Reactors

Two-Dimensional Fluid Simulation and Langmuir Probe Measurement of a Planar Inductively Coupled Oxygen Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.6890 ◽

1999 ◽

Vol 38 (Part 1, No. 12A) ◽

pp. 6890-6895 ◽

Cited By ~ 16

Author(s):

Hyun Jin Yoon ◽

Tae Hun Chung ◽

Dong Cheol Seo

Keyword(s):

Langmuir Probe ◽

Oxygen Plasma ◽

Fluid Simulation ◽

Probe Measurement ◽

Two Dimensional ◽

Electrostatic probe diagnostics of a planar-type radio-frequency inductively coupled oxygen plasma

Journal of Applied Physics ◽

10.1063/1.1354633 ◽

2001 ◽

Vol 89 (8) ◽

pp. 4218-4223 ◽

Cited By ~ 22

Author(s):

D. C. Seo ◽

T. H. Chung ◽

H. J. Yoon ◽

G. H. Kim

Keyword(s):

Radio Frequency ◽

Oxygen Plasma ◽

Inductively Coupled ◽

Probe Diagnostics ◽

Electrostatic Probe

A hybrid model of radio frequency biased inductively coupled plasma discharges: description of model and experimental validation in argon

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/4/045009 ◽

2016 ◽

Vol 25 (4) ◽

pp. 045009 ◽

Cited By ~ 4

Author(s):

De-Qi Wen ◽

Wei Liu ◽

Fei Gao ◽

M A Lieberman ◽

You-Nian Wang

Keyword(s):

Radio Frequency ◽

Hybrid Model ◽

Experimental Validation ◽

Plasma Discharges ◽

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) ◽

Experimental and numerical investigation of a planar type radio frequency inductively coupled oxygen plasma

10.1109/plasma.2000.854818 ◽

2002 ◽

Author(s):

T.H. Chung ◽

D.C. Seo ◽

S.W. Chung ◽

H.J. Yoon

Keyword(s):

Radio Frequency ◽

Numerical Investigation ◽

Oxygen Plasma ◽

Two-dimensional fluid model simulation of bell jar top inductively coupled plasma

IEEE Transactions on Plasma Science ◽

10.1109/27.557479 ◽

1997 ◽

Vol 25 (1) ◽

pp. 1-6 ◽

Cited By ~ 8

Author(s):

Han-Ming Wu ◽

B.W. Yu ◽

Ming Li ◽

Yun Yang

Keyword(s):

Model Simulation ◽

Fluid Model ◽

Two Dimensional ◽

Two‐dimensional hybrid model of inductively coupled plasma sources for etching

Applied Physics Letters ◽

10.1063/1.109963 ◽

1993 ◽

Vol 63 (5) ◽

pp. 605-607 ◽

Cited By ~ 118

Author(s):

Peter L. G. Ventzek ◽

Timothy J. Sommerer ◽

Robert J. Hoekstra ◽

Mark J. Kushner

Keyword(s):

Hybrid Model ◽

Two Dimensional ◽

Plasma Sources ◽

Hybrid simulation of radio frequency biased inductively coupled Cl2 plasmas

Physics of Plasmas ◽

10.1063/5.0048522 ◽

2021 ◽

Vol 28 (5) ◽

pp. 053512

Author(s):

Lei Tong ◽

Yu-Ru Zhang ◽

Jia-Wei Huang ◽

Ming-Liang Zhao ◽

De-Qi Wen ◽

...

Keyword(s):

Radio Frequency ◽

Hybrid Simulation ◽

Two-dimensional nonlocal heating theory of planar-type inductively coupled plasma discharge

Physical Review E ◽

10.1103/physreve.55.7536 ◽

1997 ◽

Vol 55 (6) ◽

pp. 7536-7549 ◽

Cited By ~ 45

Author(s):

N. S. Yoon ◽

S. M. Hwang ◽

Duk-In Choi

Keyword(s):

Plasma Discharge ◽

Two Dimensional ◽

Inductively Coupled ◽

Nonlocal Heating

Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. II. Ar/Cl2 pulsed plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1434965 ◽

2002 ◽

Vol 20 (2) ◽

pp. 325-334 ◽

Cited By ~ 34

Author(s):

Pramod Subramonium ◽

Mark J. Kushner

Keyword(s):

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Pulsed Plasmas ◽

Inductively Coupled ◽

Dimensional Modeling ◽

Coupled Plasmas