Numerical and Experimental Investigation on the Attenuation of Electromagnetic Waves in Unmagnetized Plasmas Using Inductively Coupled Plasma Actuator

Plasma Science and Technology ◽

10.1088/1009-0630/17/10/07 ◽

2015 ◽

Vol 17 (10) ◽

pp. 847-852 ◽

Author(s):

Min Lin ◽

Haojun Xu ◽

Xiaolong Wei ◽

Hua Liang ◽

Huimin Song ◽

...

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Electromagnetic Waves ◽

Plasma Actuator ◽

Inductively Coupled

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Experimental investigation of inductively coupled plasma etching on cemented carbides

Vacuum ◽

10.1016/j.vacuum.2019.01.032 ◽

2019 ◽

Vol 162 ◽

pp. 101-109 ◽

Author(s):

Yunsong Lian ◽

Chenliang Mu ◽

Chaoping Xie ◽

Bin Yao

Keyword(s):

Experimental Investigation ◽

Plasma Etching ◽

Inductively Coupled Plasma ◽

Cemented Carbides ◽

Inductively Coupled Plasma Etching ◽

Inductively Coupled

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Experimental Investigation of Inductively Coupled Plasma Cathode for the Application to Ion Thrusters

47th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit ◽

10.2514/6.2011-5989 ◽

2011 ◽

Author(s):

Hiroki Watanabe ◽

Takuya Nakabayashi ◽

Satoshi Kasagami ◽

Junichiro Aoyagi ◽

Haruki Takegahara

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Plasma Cathode ◽

Inductively Coupled ◽

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Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O 2 inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.5079585 ◽

2019 ◽

Vol 125 (2) ◽

pp. 023303 ◽

Author(s):

Chan Xue ◽

Fei Gao ◽

De-Qi Wen ◽

You-Nian Wang

Keyword(s):

Experimental Investigation ◽

Radio Frequency ◽

Electron Impact ◽

Inductively Coupled Plasma ◽

Impact Excitation ◽

Electron Impact Excitation ◽

Inductively Coupled

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Experimental Investigation of High Efficient Inductively Coupled Plasma by Splitting External Antenna Coil

2017 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2017.8496142 ◽

2017 ◽

Author(s):

H. S. Rhee ◽

D. H. Kim ◽

S. Nawaz ◽

S. J. Yoon

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

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Experimental investigation of a pulsed linear inductively coupled plasma

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633248 ◽

2013 ◽

Author(s):

W. M. Hsiao ◽

C. H. Hsieh ◽

K. C. Leou

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Inductively Coupled

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Experimental Investigation of Ar Inductively Coupled Plasma in a Closed Low-Pressure Chamber

IEEE Transactions on Plasma Science ◽

10.1109/tps.2018.2817575 ◽

2018 ◽

Vol 46 (5) ◽

pp. 1809-1815

Author(s):

Zhijie Song ◽

Haojun Xu ◽

Xiaolong Wei ◽

Zenghui Chen

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Low Pressure ◽

Pressure Chamber ◽

Inductively Coupled

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Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasma

Acta Physica Sinica ◽

10.7498/aps.68.20190071 ◽

2019 ◽

Vol 68 (10) ◽

pp. 105202

Author(s):

Gai-Ling Zhang ◽

Yue Hua ◽

Ze-Yu Hao ◽

Chun-Sheng Ren

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Plasma Parameters ◽

Inductively Coupled

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Experimental investigation and parameter diagnosis of air high-pressure ring-shaped inductively coupled plasma

Acta Physica Sinica ◽

10.7498/aps.64.175201 ◽

2015 ◽

Vol 64 (17) ◽

pp. 175201

Author(s):

Wei Xiao-Long ◽

Xu Hao-Jun ◽

Li Jian-Hai ◽

Lin Min ◽

Song Hui-Min

Keyword(s):

Experimental Investigation ◽

High Pressure ◽

Inductively Coupled Plasma ◽

Inductively Coupled

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Experimental investigation of high power inductively coupled plasma etching of fused silica at atmospheric pressure

Second Target Recognition and Artificial Intelligence Summit Forum ◽

10.1117/12.2551583 ◽

2020 ◽

Author(s):

Xiaoqiang Zhang ◽

Yuancheng Sun ◽

Xiurong Du ◽

Xuefu Song

Keyword(s):

Experimental Investigation ◽

Plasma Etching ◽

Atmospheric Pressure ◽

Inductively Coupled Plasma ◽

Fused Silica ◽

Inductively Coupled Plasma Etching ◽

Inductively Coupled

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Experimental investigation of edge-to-center density ratio in E-H mode transition of an inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.5001961 ◽

2017 ◽

Vol 24 (12) ◽

pp. 123506 ◽

Author(s):

Il-seo Park ◽

Hyun-Ju Kang ◽

Kyung-Hyun Kim ◽

Chin-Wook Chung

Keyword(s):

Experimental Investigation ◽

Inductively Coupled Plasma ◽

Density Ratio ◽

Mode Transition ◽

Inductively Coupled ◽

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