High sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium alloy for fast response and low power consumption

2018 ◽  
Vol 28 (9) ◽  
pp. 094001 ◽  
Author(s):  
Hiroaki Yamazaki ◽  
Yumi Hayashi ◽  
Kei Masunishi ◽  
Daiki Ono ◽  
Tamio Ikehashi
2019 ◽  
Vol 102 (3) ◽  
pp. 70-77 ◽  
Author(s):  
Hiroaki Yamazaki ◽  
Yumi Hayashi ◽  
Kei Masunishi ◽  
Daiki Ono ◽  
Tamio Ikehashi

Nanoscale ◽  
2020 ◽  
Vol 12 (13) ◽  
pp. 7196-7205 ◽  
Author(s):  
Jianting Lu ◽  
Zhaoqiang Zheng ◽  
Jiandong Yao ◽  
Wei Gao ◽  
Ye Xiao ◽  
...  

Self-powered photodetectors have triggered extensive attention in recent years due to the advantages of high sensitivity, fast response, low power consumption, high level of integration and wireless operation.


Sensors ◽  
2019 ◽  
Vol 19 (2) ◽  
pp. 374 ◽  
Author(s):  
Ayoub Lahlalia ◽  
Olivier Le Neel ◽  
Ravi Shankar ◽  
Siegfried Selberherr ◽  
Lado Filipovic

Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power consumption of 10.5 mW. In addition, the sensors realize fast response and recovery times of 20 s and 2.3 min, respectively. To further improve the baseline stability and sensing response characteristics at low power consumption, a novel sensor is conceived of and proposed. Tantalum aluminum (TaAl) is used as a microheater, whereas Pt-doped SnO2 is used as a thin film sensing layer. Both layers were deposited on top of a porous silicon nitride membrane. In this paper, two designs are characterized by simulations and experimental measurements, and the results are comparatively reported. Simultaneously, the impact of a heat pulsing mode and rubber smartphone cases on the sensing performance of the gas sensor are highlighted.


Sensors ◽  
2019 ◽  
Vol 19 (1) ◽  
pp. 188 ◽  
Author(s):  
Debo Wei ◽  
Jianyu Fu ◽  
Ruiwen Liu ◽  
Ying Hou ◽  
Chao Liu ◽  
...  

Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.


2020 ◽  
Vol 236 ◽  
pp. 116064 ◽  
Author(s):  
Fajr I.M. Ali ◽  
Saleh T. Mahmoud ◽  
Falah Awwad ◽  
Yaser E. Greish ◽  
Ayah F.S. Abu-Hani

Polymers ◽  
2019 ◽  
Vol 11 (11) ◽  
pp. 1898 ◽  
Author(s):  
Yue Cao ◽  
Daming Zhang ◽  
Yue Yang ◽  
Baizhu Lin ◽  
Jiawen Lv ◽  
...  

This article demonstrates a dispersed-monolayer graphene-doped polymer/silica hybrid Mach–Zehnder interferometer (MZI) thermal optical switch with low-power consumption and fast response. The polymer/silica hybrid MZI structure reduces the power consumption of the device as a result of the large thermal optical coefficient of the polymer material. To further decrease the response time of the thermal optical switch device, a polymethyl methacrylate, doped with monolayer graphene as a cladding material, has been synthesized. Our study theoretically analyzed the thermal conductivity of composites using the Lewis–Nielsen model. The predicted thermal conductivity of the composites increased by 133.16% at a graphene volume fraction of 0.263 vol %, due to the large thermal conductivity of graphene. Measurements taken of the fabricated thermal optical switch exhibited a power consumption of 7.68 mW, a rise time of 40 μs, and a fall time of 80 μs at a wavelength of 1550 nm.


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