High sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium alloy for fast response and low power consumption
2018 ◽
Vol 28
(9)
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pp. 094001
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2018 ◽
Vol 138
(7)
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pp. 312-318
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2019 ◽
Vol 102
(3)
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pp. 70-77
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2005 ◽
Vol 245
(1-6)
◽
pp. 137-144
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