scholarly journals Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Sensors ◽  
2019 ◽  
Vol 19 (1) ◽  
pp. 188 ◽  
Author(s):  
Debo Wei ◽  
Jianyu Fu ◽  
Ruiwen Liu ◽  
Ying Hou ◽  
Chao Liu ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Forward Bias ◽  
High Sensitivity ◽  
Bias Current ◽  
Low Power Consumption ◽  
Sensor Performance ◽  
Sensor Structure ◽  
Vacuum Sensor ◽  
The One

Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.

scholarly journals Enhanced Sensing Performance of Integrated Gas Sensor Devices

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1508
Author(s):  
Ayoub Lahlalia ◽  
Olivier Le Neel ◽  
Ravi Shankar ◽  
Siegfried Selberherr ◽  
Lado Filipovic
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensors ◽  
Low Power Consumption ◽  
Experimental Characterization ◽  
Response Characteristics ◽  
Sensor Performance ◽  
Sensor Structure ◽  
New Applications ◽  
Semiconducting Metal Oxide

Semiconducting metal oxide (SMO) gas sensors, dedicated to wearable devices were designed, fabricated, and characterized in terms of power consumption, thermal distribution, and sensing capability. The sensors demonstrate a sensitivity down to ppb-level VOC concentrations at a low power consumption of 10.5 mW. To further enhance the baseline stability and sensing response characteristics at low power consumption, a new sensor structure is proposed. The design implements novel aspects in terms of fabrication and microheater geometry, leading to improved sensor performance which enables new applications for SMO gas sensors. In this work, two designs were analyzed using experimental characterization and simulation. The results of the analyses of the two sensors are comparatively reported.

Design and Fabrication of a MEMS-Based Gas Sensor

2009 ◽  
Vol 74 ◽  
pp. 255-258 ◽  
Author(s):  
Jin Ho Yoon ◽  
Jung Sik Kim
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Sol Gel ◽  
High Sensitivity ◽  
Low Power Consumption ◽  
Potential Candidate ◽  
Gas Sensitivity ◽  
Thin Film Layer ◽  
Sol Gel Process

In this study, the micro gas sensor for NOx gas was fabricated by using a MEMS technology and sol-gel process. The sensing electrode and micro heater were designed to be a co-planar typed structure in the Pt thin film layer. The fabricated micro platform had a low power consumption of 67 mW at 2.0 V of heater voltage and 300°C of operating temperature. Indium oxide as a sensing material for NOx gas was synthesized by a sol-gel process with indium isopropoxide. The particle size of synthesized In2O3 was identified as about 50 nm. The maximum gas sensitivity as relative resistance (Rs = Rgas / Rair) occurred at 300°C with the value of 8.0 at 1 ppm NO2 gas. The present study shows that a MEMS-based gas sensor is a potential candidate for the automobile AQS (air quality system) gas sensor with many advantages of small dimension, high sensitivity, short response time and low power consumption.

scholarly journals Bi2O2Se photoconductive detector with low power consumption and high sensitivity

2020 ◽  
Vol 69 (24) ◽  
pp. 248502-248502
Author(s):  
Li Dan-Yang ◽  
◽  
Han Xu ◽  
Xu Guang-Yuan ◽  
Liu Xiao ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
High Sensitivity ◽  
Low Power Consumption ◽  
Photoconductive Detector

A conversion-type electrochemical artificial synapse for plasticity modulation and dendritic application

2021 ◽  
Author(s):  
Huanhuan Wei ◽  
Haiyang Yu ◽  
Jiangdong Gong ◽  
Renjie Li ◽  
Hong Han ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
High Sensitivity ◽  
Low Power Consumption ◽  
Memory Enhancement ◽  
Dendritic Integration ◽  
Artificial Synapse ◽  
Potential Applications

A conversion-type electrochemical artificial synapse exhibits potential applications for memory enhancement and dendritic integration; ultra-high sensitivity (3 mV) and extremely low-power consumption (32 fW) could be achieved.

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