In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
2018 ◽
Vol 51
(44)
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pp. 445201
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Keyword(s):
2014 ◽
Vol 65
(1-2)
◽
pp. 361-368
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Keyword(s):
2013 ◽
Vol 228
(1)
◽
pp. 56-63
◽
Model validations for low-global warming potential refrigerants in mini-split air-conditioning units
2016 ◽
Vol 22
(8)
◽
pp. 1254-1262
◽
Keyword(s):
Keyword(s):
2019 ◽
Vol 100
◽
pp. 471-483
◽
2020 ◽
Vol 905
◽
pp. 012070