Research and calculation of dynamic characteristics of a microelectromechanical device
2021 ◽
Vol 2086
(1)
◽
pp. 012016
Abstract This paper presents a model of a three-axis micromechanical gyroscope-accelerometer. The stiffness of the suspension of a micromechanical gyroscope-accelerometer is calculated and the dependence of the change in the frequency of vibration of the micromechanical mass on the change in the thickness of the beams of the cruciform suspension element is obtained.
2015 ◽
Vol 81
◽
pp. 012096
◽
2021 ◽
Vol 2086
(1)
◽
pp. 012206
Keyword(s):
1998 ◽
Vol 08
(PR3)
◽
pp. Pr3-81-Pr3-86
2019 ◽
Vol 1
(4)
◽
pp. 21-27
Keyword(s):
2009 ◽
Vol E92-B
(3)
◽
pp. 998-1003
◽