scholarly journals Research and calculation of dynamic characteristics of a microelectromechanical device

2021 ◽  
Vol 2086 (1) ◽  
pp. 012016
Author(s):  
I E Lysenko ◽  
N F Kidyaev ◽  
O A Ezhova ◽  
D Y Sevostyanov

Abstract This paper presents a model of a three-axis micromechanical gyroscope-accelerometer. The stiffness of the suspension of a micromechanical gyroscope-accelerometer is calculated and the dependence of the change in the frequency of vibration of the micromechanical mass on the change in the thickness of the beams of the cruciform suspension element is obtained.

2021 ◽  
Vol 2086 (1) ◽  
pp. 012206
Author(s):  
I E Lysenko ◽  
D Y Sevostyanov ◽  
N F Kidyaev ◽  
A V Kovalev

Abstract In this paper, an original design of a micromechanical gyroscope-accelerometer is proposed. A parametrizable geometric and finite element model of a micromechanical device is presented. The dynamic characteristics of the structure are studied and the dependences of the natural oscillation frequencies on the geometric parameters of the gyroscope-accelerometer are obtained.


1998 ◽  
Vol 08 (PR3) ◽  
pp. Pr3-81-Pr3-86
Author(s):  
F. Aniel ◽  
N. Zerounian ◽  
A. Gruhle ◽  
C. Mähner ◽  
G. Vernet ◽  
...  

2017 ◽  
Vol 13 (1) ◽  
pp. 30-33
Author(s):  
N.V. Ivanenko ◽  
◽  
О.A. Bazyey ◽  

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