Research Of Dynamic Characteristics Of A Three-axis Micromechanical Gyroscope-Accelerometer

In this paper, an original design of a micromechanical gyroscope-accelerometer is proposed. A parametrizable geometric and finite element model of a micromechanical device is presented. The dynamic characteristics of the structure are studied and the dependences of the natural oscillation frequencies on the geometric parameters of the gyroscope-accelerometer are obtained.

Research on Techniques of Electro Less Nickel Plating Nano-C60 Crystals on the Surface of Micromechanical Devices by Laser-Induced Way

In order to improve the dispersion performance of nano-C60 crystals, the surface metallization was achieved by electro less nickel plating; By the laser-induced way, a new composite coating was got on a micromechanical device, which contained some metalized nano-C60 crystals. Research on the fretting friction and wear behavior of the composite coating, its ability of Wear Resistance were improved evidently.

Research on Terahertz Filters Employing the Effect of Frustrated Total Internal Reflection

The optical filter under development employing frustrated total internal reflection is a micromechanical device containing two silicon rectangular prisms. There is flat silicon plane among hypotenuse edges of the prisms. The silicon plane is a Fabry-Perot resonator, with clearances h1 among the plate and prism edges being its mirrors. Theoretical resolution of the optical filter would be R ≈ 1,5∙103 if h1 = 50 µm and R ≈ 3∙105 if h1 = 100 µm with the thickness of the silicon plane being h = 65 µm; wavelength λ = 100 µm; free spectral region Δλ/λ ≈ 0,3…0,4, transmission in the maximum of spectral characteristics 0,6 (provided input and output silicon prism legs bloom).