Design of the Capacitive Dual-Mass Micromechanical Gyroscope

Development of micromechanical inertial sensors have made it possible to use them in the navigation and motion control systems. This application area imposes strict requirements on sensors. One of the ways to meet the requirements and to improve the gyroscope characteristics is to apply a dual- or multi-mass architecture of a gyroscope sensing element. This paper presents the results of dual-mass micromechanical gyroscope with a measurement range of ±450°/s design. The complex design method, including simulation at the system level, model refinement based on the results of finite element modelling, and modelling of individual electronic blocks at the circuit level, is described.

Design and Simulation of the Two-Axis Micromachined Angular Rate Sensor

Micromechanical inertia sensors - accelerometers, gyroscopes, multisensor modules and systems based on them - are widely used in navigation, for compensation of other instruments (accelerometers, inclinometers) or stabilization (gyroscopes). The paper presents the designed construction of a MEMS angular rate sensor with two sensitivity axes, topology of gyroscope is presented; modal and static analysis is performed using ANSYS CAD; simulation results of micromechanical gyroscope operation under the action of angular velocities using VHDL-AMS are presented.

Research Of Dynamic Characteristics Of A Three-axis Micromechanical Gyroscope-Accelerometer

In this paper, an original design of a micromechanical gyroscope-accelerometer is proposed. A parametrizable geometric and finite element model of a micromechanical device is presented. The dynamic characteristics of the structure are studied and the dependences of the natural oscillation frequencies on the geometric parameters of the gyroscope-accelerometer are obtained.

Research and calculation of dynamic characteristics of a microelectromechanical device

This paper presents a model of a three-axis micromechanical gyroscope-accelerometer. The stiffness of the suspension of a micromechanical gyroscope-accelerometer is calculated and the dependence of the change in the frequency of vibration of the micromechanical mass on the change in the thickness of the beams of the cruciform suspension element is obtained.

Compensation Gyrocompass Based on MEMS

The study of an astatic compensating gyrocompass, built on the basis of a modulation micromechanical gyroscope (MMG) of a hybrid type, has been carried out. A kinematic diagram is given and the principle of operation of the device has describing. The device uses the modulation principle based on obtaining information about the angular motion of the rotor and creating control torques in a rotating coordinate system, which makes it possible to exclude such a significant disadvantage of MMG as "zero offset". A feature of the gyrocompass under consideration is the use of two channels for controlling the rotor of the MMG, namely: a channel for the formation of a guiding moment, striving to combine its main axis with the direction of the true meridian and a channel for compensating this guiding moment. A linearized mathematical model has building, on the base of which an effective algorithm for the operation of a compensatory astatic gyrocompass is proposed. The device under consideration can be used to determine the true azimuth of the longitudinal axis of a mobile ground object, it has a higher measurement speed compared to devices built on three-degree "heavy" gyroscopes, and has good resistance to external influences (vibrations, shocks, etc.).

Study on free oscillations of a micromechanical gyroscope taking into account the nonorthogonality of the torsion axes

Introduction. The paper is devoted to the study on free oscillations of the sensing element of a micromechanical R-Rtype gyroscope of frame construction developed by the Kuznetsov Research Institute of Applied Mechanics, taking into account the nonorthogonality of the torsion axes. The influence of the instrumental manufacturing error on the accuracy of a gyroscope on a movable base in the case of free oscillations is studied. The work objective was to improve the device accuracy through developing a mathematical model of an R-R type micromechanical gyroscope, taking into account the nonorthogonality of the torsion axes, and to study the influence of this error on the device accuracy. The urgency of the problem of increasing the accuracy of micromechanical gyroscopes is associated with improving the accuracy of inertial navigation systems based on micromechanical sensors.Materials and Methods. A new mathematical model that describes the gyroscope dynamics, taking into account the instrumental error of manufacturing the device, and a formula for estimating the error of a gyroscope, are proposed. The dependences of the state variables obtained from the results of modeling and on the basis of the experiment are presented. Methods of theoretical mechanics and asymptotic methods, including the Lagrange formalism and the Krylov-Bogolyubov averaging method, were used in the research.Results. A new mathematical model of the gyroscope dynamics, taking into account the nonorthogonality of the torsion axes, is developed. The solution to the equations of small oscillations of the gyroscope sensing element and the estimate of the precession angle for the case of a movable base are obtained. A comparative analysis of the developed model and the experimental data obtained in the case of free oscillations of the gyroscope sensing element with a fixed base is carried out. The analysis has confirmed the adequacy of the constructed mathematical model. Analytical expressions are formed. They demonstrate the fact that the nonorthogonality of the torsion axes causes a cross-influence of the amplitudes of the primary vibrations on the amplitudes of the secondary vibrations of the sensing element, and the appearance of an additional error in the angular velocity readings when the gyroscope is operating in free mode.Discussion and Conclusions. The results obtained can be used to improve the device accuracy using the algorithm for analytical compensation of the gyroscope error and the method for identifying the mathematical model parameters.