Development of techniques for the formation of a planar electric vacuum diode based on an array of CNTs synthesized at the edge of the Co-Nb-N-(O) film
2021 ◽
Vol 2103
(1)
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pp. 012120
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Abstract This work shows the possibility of forming a planar diode structure based on carbon nanotubes formed on a catalytic alloy film Co-Nb-N-(O). The paper presents a technological route for the formation of a planar diode structure Si/SiO2/Si3N4/Co-Nb-N-(O)/SiO2 and studies the emission characteristics. The current-voltage characteristic of the obtained diode structure in the Fowler-Nordheim coordinates is close to linear in the range from 15 to 22 V, which confirms the phenomenon of electron emission.
1986 ◽
Vol 403
(1825)
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pp. 285-311
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1991 ◽
Vol 6
(12)
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pp. 1163-1166
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1999 ◽
Vol 14
(1)
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pp. 114-117
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2018 ◽
Vol 32
(29)
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pp. 1850323
2007 ◽
Vol 50
(8)
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pp. 783-787
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2011 ◽
Vol 44
(1)
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pp. 322-326
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