Development of atmospheric pressure glow discharge plasma assisted CVD system for the deposition of SiOx coatings

2019 ◽  
Vol 14 (06) ◽  
pp. P06026-P06026 ◽  
Author(s):  
H. Pardeshi ◽  
P.P. Patil ◽  
J. Bange
2010 ◽  
Vol 22 (10) ◽  
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万军 Wan Jun ◽  
贾向红 Jia Xianghong ◽  
宋铭炜 Song Mingwei ◽  
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2017 ◽  
Vol 110 (2) ◽  
pp. 024102 ◽  
Author(s):  
Wenzheng Liu ◽  
Chuanlong Ma ◽  
Weisheng Cui ◽  
Xiao Yang ◽  
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...  

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