Metal Leadframe Surface Cleaning Prior to Electroplating by Atmospheric Pressure Glow Discharge Plasma

2005 ◽  
pp. 869-874
Author(s):  
Jung Hee Cho ◽  
Bang Kwon Kang ◽  
Kyung Soo Kim ◽  
Kyoung Bog Jin ◽  
Sae Hoon Kim ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Discharge Plasma ◽  
Surface Cleaning ◽  
Glow Discharge Plasma ◽  
Atmospheric Pressure Glow Discharge ◽  
Pressure Glow Discharge

Metal Leadframe Surface Cleaning Prior to Electroplating by Atmospheric Pressure Glow Discharge Plasma

2005 ◽  
Vol 297-300 ◽  
pp. 869-874
Author(s):  
Jung Hee Cho ◽  
Bang Kwon Kang ◽  
Kyung Soo Kim ◽  
Kyoung Bog Jin ◽  
Sae Hoon Kim ◽  
...  
Keyword(s):  
Contact Angle ◽  
Glow Discharge ◽  
Photoelectron Spectroscopy ◽  
Atmospheric Pressure ◽  
Discharge Plasma ◽  
Processing Condition ◽  
Surface Cleaning ◽  
Glow Discharge Plasma ◽  
Atmospheric Pressure Glow Discharge ◽  
Pressure Glow Discharge

Metal leadframes (Alloy 42) were cleaned using atmospheric pressure glow discharge plasma. Atmospheric pressure glow plasma was generated by a RF source of 13.56MHz with a matching network (300W power) on to the leadframes free from streamers and arc. Argon (Ar) and oxygen (O2) were used as the carrier gas and reactive gas, respectively. The addition of O2 gas to Ar decreased the contact angle of water and increased the surface cleaning rate due to the ncrease of oxygen radicals in the plasma. The chemical characteristics and morphologies of leadframe surface after the plama treatment were analyzed using X-ray photoelectron spectroscopy (XPS) and atomic force microscope (AFM), respectively. The contact angle of 82° before the plasma treatment was decreased to 5° in the processing condition with oxygen flow rate of 50sccm, treatment speed of 100mm/sec, and input power of 300W. These surface cleaning effect will be very useful in the replacement many steps of wet cleaning before electroplating.

Nanosecond-pulsed atmospheric pressure glow discharge plasma and its applications

2010 ◽  
Vol 22 (10) ◽  
pp. 2299-2302
Author(s):  
万军 Wan Jun ◽  
贾向红 Jia Xianghong ◽  
宋铭炜 Song Mingwei ◽  
王守国 Wang Shouguo
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Atmospheric Pressure Glow Discharge ◽  
Pressure Glow Discharge

Study of atmospheric-pressure glow discharge plasma jets based on analysis of electric field

2017 ◽  
Vol 110 (2) ◽  
pp. 024102 ◽  
Author(s):  
Wenzheng Liu ◽  
Chuanlong Ma ◽  
Weisheng Cui ◽  
Xiao Yang ◽  
Tahan Wang ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Electric Field ◽  
Atmospheric Pressure ◽  
Discharge Plasma ◽  
Plasma Jets ◽  
Glow Discharge Plasma ◽  
Atmospheric Pressure Glow Discharge ◽  
Pressure Glow Discharge
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